Waveguide fabrication in fused silica using tightly focused femtosecond laser pulses

James W Chan, Thomas R Huser, Subhash H. Risbud, Denise M. Krol

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Scopus citations


Refractive index changes have been induced inside bulk fused silica by using femtosecond (fs) laser pulses tightly focused inside the material. Waveguides have been fabricated inside the glass by scanning the glass with respect to the focal point of the laser beam. The refractive index change is estimated to be ∼ 10 -4. Other more complex three-dimensional structures have also been fabricated (curved waveguides, splitters, and interferometers). We also report on fluorescence spectroscopy of the fs-modified fused silica using a confocal microscopy setup. Using a 488 nm excitation source, a fluorescence at 630 nm is observed from the modified glass, which is attributed to the presence of non-bridging oxygen hole center (NBOHC) defects created by the fs pulses. The fluorescence decays with prolonged exposure to the 488 nm light, indicating that the defects are being photobleached by the excitation light.

Original languageEnglish (US)
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
EditorsY.S. Sidorin, A. Tervonen
Number of pages8
StatePublished - 2002
EventIntergrated Optics: Devices, Materials, and Technologies VI - San Jose, CA, United States
Duration: Jan 21 2002Jan 23 2002


OtherIntergrated Optics: Devices, Materials, and Technologies VI
Country/TerritoryUnited States
CitySan Jose, CA


  • Confocal microscopy
  • Femtosecond lasers
  • Fused silica
  • Laser microfabrication
  • Optical device fabrication

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics


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