Water-Assisted growth of uniform 100 mm diameter SWCNT arrays

Roman M. Wyss, Jennifer E. Klare, Hyung Gyu Park, Aleksandr Noy, Olgica Bakajin, Valentin Lulevich

Research output: Contribution to journalArticlepeer-review

12 Scopus citations


We report a simple method for growing high-quality single-walled carbon nanotube (SWCNT) arrays on 100 mm wafers via the addition of water vapor to highly purified gases during the CNT growth step. We show that adding a small amount of water during growth helps to create a uniform catalyst distribution and yields high-quality (Raman G/D of 26 ± 3), high-density (up to 6 × 1011 cm-2) and uniform SWCNT arrays on 100 mm large wafers. We rationalize our finding by suggesting that the addition of water decreases catalyst mobility, preventing its coarsening at higher temperatures. We also report a new mechanism of catalyst inactivation in wafer-scale growth using ultrapurified gas sources by the formation of large, 5 ± 3 μm iron particles. We found such formations to be common for substrates with large temperature gradients, such as for wafers processed in a typical cold-wall chemical vapor deposition reactor.

Original languageEnglish (US)
Pages (from-to)21019-21025
Number of pages7
JournalACS Applied Materials and Interfaces
Issue number23
StatePublished - Dec 10 2014
Externally publishedYes


  • aligned SWCNT array
  • catalyst inactivation
  • catalyst mobility
  • catalyst ripening
  • wafer scale CNT synthesis
  • water assisted SWCNT growth

ASJC Scopus subject areas

  • Materials Science(all)


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