Abstract
This paper presents wafer level packaging of a miniature MOEMS monochromator for biomedical spectroscopy. Optical microlens and piezoelectrically-actuated diffraction grating are fabricated, and packaged at a wafer level into a complete, integrated monochromator with a fiber input. The packaged monochromator is an optical and mechanical system derived from a macroscale Czerny Turner monochromator. It integrates an angled mirror for folding and directing the input light path. A lithographically-defined reflective diffraction grating accepts and spectrally separates the input light from a fiber that is inserted into the built-in groove. The diffracted light is then collected through a diaphragm-suspended microlens and spatially separated on its path towards the output of the system. The packaging, done via encapsulated silicon cavities, provides batch processing and finishing of the complete device. The MLD is characterized with a Gaussian beam propagation model and the SSC packaged device is measured by its resolution and stray light through profiling with a CCD array.
| Original language | English (US) |
|---|---|
| Title of host publication | Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) |
| Pages | 715-718 |
| Number of pages | 4 |
| State | Published - 2007 |
| Event | 20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007 - Kobe, Japan Duration: Jan 21 2007 → Jan 25 2007 |
Other
| Other | 20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007 |
|---|---|
| Country | Japan |
| City | Kobe |
| Period | 1/21/07 → 1/25/07 |
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ASJC Scopus subject areas
- Electrical and Electronic Engineering
- Mechanical Engineering
- Condensed Matter Physics
- Electronic, Optical and Magnetic Materials
Cite this
Wafer-level packaging of three-dimensional MOEMS device with lens diaphragm. / Lo, Joe F.; Fang, Qiyin; Marcu, Laura; Kim, Eun Sok.
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). 2007. p. 715-718 4433086.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - Wafer-level packaging of three-dimensional MOEMS device with lens diaphragm
AU - Lo, Joe F.
AU - Fang, Qiyin
AU - Marcu, Laura
AU - Kim, Eun Sok
PY - 2007
Y1 - 2007
N2 - This paper presents wafer level packaging of a miniature MOEMS monochromator for biomedical spectroscopy. Optical microlens and piezoelectrically-actuated diffraction grating are fabricated, and packaged at a wafer level into a complete, integrated monochromator with a fiber input. The packaged monochromator is an optical and mechanical system derived from a macroscale Czerny Turner monochromator. It integrates an angled mirror for folding and directing the input light path. A lithographically-defined reflective diffraction grating accepts and spectrally separates the input light from a fiber that is inserted into the built-in groove. The diffracted light is then collected through a diaphragm-suspended microlens and spatially separated on its path towards the output of the system. The packaging, done via encapsulated silicon cavities, provides batch processing and finishing of the complete device. The MLD is characterized with a Gaussian beam propagation model and the SSC packaged device is measured by its resolution and stray light through profiling with a CCD array.
AB - This paper presents wafer level packaging of a miniature MOEMS monochromator for biomedical spectroscopy. Optical microlens and piezoelectrically-actuated diffraction grating are fabricated, and packaged at a wafer level into a complete, integrated monochromator with a fiber input. The packaged monochromator is an optical and mechanical system derived from a macroscale Czerny Turner monochromator. It integrates an angled mirror for folding and directing the input light path. A lithographically-defined reflective diffraction grating accepts and spectrally separates the input light from a fiber that is inserted into the built-in groove. The diffracted light is then collected through a diaphragm-suspended microlens and spatially separated on its path towards the output of the system. The packaging, done via encapsulated silicon cavities, provides batch processing and finishing of the complete device. The MLD is characterized with a Gaussian beam propagation model and the SSC packaged device is measured by its resolution and stray light through profiling with a CCD array.
UR - http://www.scopus.com/inward/record.url?scp=52249118945&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=52249118945&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:52249118945
SN - 1424409519
SN - 9781424409518
SP - 715
EP - 718
BT - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ER -