Ultrahigh-resolution x-ray tomography

W. S. Haddad, I. McNulty, J. E. Trebes, E. H. Anderson, R. A. Levesque, L. Yang

Research output: Contribution to journalArticle

115 Scopus citations

Abstract

Ultrahigh-resolution three-dimensional images of a microscopic test object were made with soft x-rays collected with a scanning transmission x-ray microscope. The test object consisted of two different patterns of gold bars on silicon nitride windows that were separated by ~ 5 micrometers. Depth resolution comparable to the transverse resolution was achieved by recording nine two-dimensional images of the object at angles between -50 and +55 degrees with respect to the beam axis. The projections were then combined tomographically to form a three-dimensional image by means of an algorithm using an algebraic reconstruction technique. A transverse resolution of ~ 1000 angstroms was observed. Artifacts in the reconstruction limited the overall depth resolution to ~ 6000 angstroms; however, some features were clearly reconstructed with a depth resolution of ~ 1000 angstroms.

Original languageEnglish (US)
Pages (from-to)1213-1215
Number of pages3
JournalScience
Volume266
Issue number5188
StatePublished - Nov 18 1994
Externally publishedYes

ASJC Scopus subject areas

  • General

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    Haddad, W. S., McNulty, I., Trebes, J. E., Anderson, E. H., Levesque, R. A., & Yang, L. (1994). Ultrahigh-resolution x-ray tomography. Science, 266(5188), 1213-1215.