Abstract
Ultrahigh-resolution three-dimensional images of a microscopic test object were made with soft x-rays collected with a scanning transmission x-ray microscope. The test object consisted of two different patterns of gold bars on silicon nitride windows that were separated by ~ 5 micrometers. Depth resolution comparable to the transverse resolution was achieved by recording nine two-dimensional images of the object at angles between -50 and +55 degrees with respect to the beam axis. The projections were then combined tomographically to form a three-dimensional image by means of an algorithm using an algebraic reconstruction technique. A transverse resolution of ~ 1000 angstroms was observed. Artifacts in the reconstruction limited the overall depth resolution to ~ 6000 angstroms; however, some features were clearly reconstructed with a depth resolution of ~ 1000 angstroms.
Original language | English (US) |
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Pages (from-to) | 1213-1215 |
Number of pages | 3 |
Journal | Science |
Volume | 266 |
Issue number | 5188 |
State | Published - Nov 18 1994 |
Externally published | Yes |
ASJC Scopus subject areas
- General