Ultrahigh-resolution soft x-ray tomography

Waleed S. Haddad, James E. Trebes, Dennis M. Goodman, Heung Rae Lee, Ian McNulty, Erik H. Anderson, Andrei O. Zalensky

Research output: Chapter in Book/Report/Conference proceedingConference contribution

6 Citations (Scopus)

Abstract

Ultra high resolution three-dimensional images of a microscopic test object were made with soft x rays using a scanning transmission x-ray microscope. The test object consisted of two different patterns of gold bars on silicon nitride windows that were separated by approximately 5 micrometer. A series of nine 2-D images of the object were recorded at angles between -5 to +55 degrees with respect to the beam axis. The projections were then combined tomographically to form a 3-D image by means of an algebraic reconstruction technique (ART) algorithm. A transverse resolution of approximately 1000 angstrom was observed. Artifacts in the reconstruction limited the overall depth resolution to approximately 6000 angstrom, however some features were clearly reconstructed with a depth resolution of approximately 1000 angstrom. A specially modified ART algorithm and a constrained conjugate gradient (CCG) code were also developed as improvements over the standard ART algorithm. Both of these methods made significant improvements in the overall depth resolution, bringing it down to approximately 1200 angstrom overall. Preliminary projection data sets were also recorded with both dry and re-hydrated human sperm cells over a similar angular range.

Original languageEnglish (US)
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
Pages102-107
Number of pages6
Volume2516
StatePublished - 1995
Externally publishedYes
EventX-Ray Microbeam Technology and Applications - San Diego, CA, USA
Duration: Jul 11 1995Jul 12 1995

Other

OtherX-Ray Microbeam Technology and Applications
CitySan Diego, CA, USA
Period7/11/957/12/95

Fingerprint

Tomography
tomography
X rays
x rays
Wave transmission
projection
Silicon nitride
Microscopes
Gold
silicon nitrides
Scanning
artifacts
micrometers
microscopes
gold
gradients
scanning
high resolution
cells

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

Cite this

Haddad, W. S., Trebes, J. E., Goodman, D. M., Lee, H. R., McNulty, I., Anderson, E. H., & Zalensky, A. O. (1995). Ultrahigh-resolution soft x-ray tomography. In Proceedings of SPIE - The International Society for Optical Engineering (Vol. 2516, pp. 102-107)

Ultrahigh-resolution soft x-ray tomography. / Haddad, Waleed S.; Trebes, James E.; Goodman, Dennis M.; Lee, Heung Rae; McNulty, Ian; Anderson, Erik H.; Zalensky, Andrei O.

Proceedings of SPIE - The International Society for Optical Engineering. Vol. 2516 1995. p. 102-107.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Haddad, WS, Trebes, JE, Goodman, DM, Lee, HR, McNulty, I, Anderson, EH & Zalensky, AO 1995, Ultrahigh-resolution soft x-ray tomography. in Proceedings of SPIE - The International Society for Optical Engineering. vol. 2516, pp. 102-107, X-Ray Microbeam Technology and Applications, San Diego, CA, USA, 7/11/95.
Haddad WS, Trebes JE, Goodman DM, Lee HR, McNulty I, Anderson EH et al. Ultrahigh-resolution soft x-ray tomography. In Proceedings of SPIE - The International Society for Optical Engineering. Vol. 2516. 1995. p. 102-107
Haddad, Waleed S. ; Trebes, James E. ; Goodman, Dennis M. ; Lee, Heung Rae ; McNulty, Ian ; Anderson, Erik H. ; Zalensky, Andrei O. / Ultrahigh-resolution soft x-ray tomography. Proceedings of SPIE - The International Society for Optical Engineering. Vol. 2516 1995. pp. 102-107
@inproceedings{0c6b0b39c1c8437b9ec70a80ed92c941,
title = "Ultrahigh-resolution soft x-ray tomography",
abstract = "Ultra high resolution three-dimensional images of a microscopic test object were made with soft x rays using a scanning transmission x-ray microscope. The test object consisted of two different patterns of gold bars on silicon nitride windows that were separated by approximately 5 micrometer. A series of nine 2-D images of the object were recorded at angles between -5 to +55 degrees with respect to the beam axis. The projections were then combined tomographically to form a 3-D image by means of an algebraic reconstruction technique (ART) algorithm. A transverse resolution of approximately 1000 angstrom was observed. Artifacts in the reconstruction limited the overall depth resolution to approximately 6000 angstrom, however some features were clearly reconstructed with a depth resolution of approximately 1000 angstrom. A specially modified ART algorithm and a constrained conjugate gradient (CCG) code were also developed as improvements over the standard ART algorithm. Both of these methods made significant improvements in the overall depth resolution, bringing it down to approximately 1200 angstrom overall. Preliminary projection data sets were also recorded with both dry and re-hydrated human sperm cells over a similar angular range.",
author = "Haddad, {Waleed S.} and Trebes, {James E.} and Goodman, {Dennis M.} and Lee, {Heung Rae} and Ian McNulty and Anderson, {Erik H.} and Zalensky, {Andrei O.}",
year = "1995",
language = "English (US)",
isbn = "0819418757",
volume = "2516",
pages = "102--107",
booktitle = "Proceedings of SPIE - The International Society for Optical Engineering",

}

TY - GEN

T1 - Ultrahigh-resolution soft x-ray tomography

AU - Haddad, Waleed S.

AU - Trebes, James E.

AU - Goodman, Dennis M.

AU - Lee, Heung Rae

AU - McNulty, Ian

AU - Anderson, Erik H.

AU - Zalensky, Andrei O.

PY - 1995

Y1 - 1995

N2 - Ultra high resolution three-dimensional images of a microscopic test object were made with soft x rays using a scanning transmission x-ray microscope. The test object consisted of two different patterns of gold bars on silicon nitride windows that were separated by approximately 5 micrometer. A series of nine 2-D images of the object were recorded at angles between -5 to +55 degrees with respect to the beam axis. The projections were then combined tomographically to form a 3-D image by means of an algebraic reconstruction technique (ART) algorithm. A transverse resolution of approximately 1000 angstrom was observed. Artifacts in the reconstruction limited the overall depth resolution to approximately 6000 angstrom, however some features were clearly reconstructed with a depth resolution of approximately 1000 angstrom. A specially modified ART algorithm and a constrained conjugate gradient (CCG) code were also developed as improvements over the standard ART algorithm. Both of these methods made significant improvements in the overall depth resolution, bringing it down to approximately 1200 angstrom overall. Preliminary projection data sets were also recorded with both dry and re-hydrated human sperm cells over a similar angular range.

AB - Ultra high resolution three-dimensional images of a microscopic test object were made with soft x rays using a scanning transmission x-ray microscope. The test object consisted of two different patterns of gold bars on silicon nitride windows that were separated by approximately 5 micrometer. A series of nine 2-D images of the object were recorded at angles between -5 to +55 degrees with respect to the beam axis. The projections were then combined tomographically to form a 3-D image by means of an algebraic reconstruction technique (ART) algorithm. A transverse resolution of approximately 1000 angstrom was observed. Artifacts in the reconstruction limited the overall depth resolution to approximately 6000 angstrom, however some features were clearly reconstructed with a depth resolution of approximately 1000 angstrom. A specially modified ART algorithm and a constrained conjugate gradient (CCG) code were also developed as improvements over the standard ART algorithm. Both of these methods made significant improvements in the overall depth resolution, bringing it down to approximately 1200 angstrom overall. Preliminary projection data sets were also recorded with both dry and re-hydrated human sperm cells over a similar angular range.

UR - http://www.scopus.com/inward/record.url?scp=0029514522&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0029514522&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:0029514522

SN - 0819418757

SN - 9780819418753

VL - 2516

SP - 102

EP - 107

BT - Proceedings of SPIE - The International Society for Optical Engineering

ER -