Towards better scanning near-field optical microscopy probes - Progress and new developments

H. Heinzelmann, J. M. Freyland, R. Eckert, Thomas R Huser, G. Schürmann, W. Noell, U. Staufers, N. F. De Rooij

Research output: Contribution to journalArticlepeer-review

5 Scopus citations


Several approaches are described with the aim of producing near-field optical probes with improved properties. Focused ion beam milling allows the fabrication of small apertures in a controlled fashion, resulting in probes with excellent polarization properties and increased transmission. Microfabrication processes are described that allow the production of apertures of 30-50 nm, facilitating the mass-fabrication of apertured tip structures that can be used in a combined force/near-field optical microscope. Finally, possible future developments are outlined.

Original languageEnglish (US)
Pages (from-to)365-368
Number of pages4
JournalJournal of Microscopy
Issue number2-3
StatePublished - 1999
Externally publishedYes


  • Aperture formation
  • Focused ion beam milling
  • Microfabricated tips
  • Near- field optical probes
  • Polarization contrast

ASJC Scopus subject areas

  • Instrumentation


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