Abstract
Several approaches are described with the aim of producing near-field optical probes with improved properties. Focused ion beam milling allows the fabrication of small apertures in a controlled fashion, resulting in probes with excellent polarization properties and increased transmission. Microfabrication processes are described that allow the production of apertures of 30-50 nm, facilitating the mass-fabrication of apertured tip structures that can be used in a combined force/near-field optical microscope. Finally, possible future developments are outlined.
Original language | English (US) |
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Pages (from-to) | 365-368 |
Number of pages | 4 |
Journal | Journal of Microscopy |
Volume | 194 |
Issue number | 2-3 |
DOIs | |
State | Published - 1999 |
Externally published | Yes |
Keywords
- Aperture formation
- Focused ion beam milling
- Microfabricated tips
- Near- field optical probes
- Polarization contrast
ASJC Scopus subject areas
- Instrumentation