Abstract
Several approaches are described with the aim of producing near-field optical probes with improved properties. Focused ion beam milling allows the fabrication of small apertures in a controlled fashion, resulting in probes with excellent polarization properties and increased transmission. Microfabrication processes are described that allow the production of apertures of 30-50 nm, facilitating the mass-fabrication of apertured tip structures that can be used in a combined force/near-field optical microscope. Finally, possible future developments are outlined.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 365-368 |
| Number of pages | 4 |
| Journal | Journal of Microscopy |
| Volume | 194 |
| Issue number | 2-3 |
| DOIs | |
| State | Published - 1999 |
| Externally published | Yes |
Keywords
- Aperture formation
- Focused ion beam milling
- Microfabricated tips
- Near- field optical probes
- Polarization contrast
ASJC Scopus subject areas
- Instrumentation
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Cite this
Heinzelmann, H., Freyland, J. M., Eckert, R., Huser, T. R., Schürmann, G., Noell, W., Staufers, U., & De Rooij, N. F. (1999). Towards better scanning near-field optical microscopy probes - Progress and new developments. Journal of Microscopy, 194(2-3), 365-368. https://doi.org/10.1046/j.1365-2818.1999.00567.x