Towards better scanning near-field optical microscopy probes - Progress and new developments

H. Heinzelmann; J. M. Freyland; R. Eckert; Thomas R Huser; G. Schürmann; W. Noell; U. Staufers; N. F. De Rooij

doi:10.1046/j.1365-2818.1999.00567.x

Towards better scanning near-field optical microscopy probes - Progress and new developments

H. Heinzelmann, J. M. Freyland, R. Eckert, Thomas R Huser, G. Schürmann, W. Noell, U. Staufers, N. F. De Rooij

Research output: Contribution to journal › Article › peer-review

5 Scopus citations

Abstract

Several approaches are described with the aim of producing near-field optical probes with improved properties. Focused ion beam milling allows the fabrication of small apertures in a controlled fashion, resulting in probes with excellent polarization properties and increased transmission. Microfabrication processes are described that allow the production of apertures of 30-50 nm, facilitating the mass-fabrication of apertured tip structures that can be used in a combined force/near-field optical microscope. Finally, possible future developments are outlined.

Original language	English (US)
Pages (from-to)	365-368
Number of pages	4
Journal	Journal of Microscopy
Volume	194
Issue number	2-3
DOIs	https://doi.org/10.1046/j.1365-2818.1999.00567.x
State	Published - 1999
Externally published	Yes

Keywords

Aperture formation
Focused ion beam milling
Microfabricated tips
Near- field optical probes
Polarization contrast

ASJC Scopus subject areas

Instrumentation

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10.1046/j.1365-2818.1999.00567.x

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AU - Heinzelmann, H.

AU - Freyland, J. M.

AU - Eckert, R.

AU - Huser, Thomas R

AU - Schürmann, G.

AU - Noell, W.

AU - Staufers, U.

AU - De Rooij, N. F.

PY - 1999

Y1 - 1999

N2 - Several approaches are described with the aim of producing near-field optical probes with improved properties. Focused ion beam milling allows the fabrication of small apertures in a controlled fashion, resulting in probes with excellent polarization properties and increased transmission. Microfabrication processes are described that allow the production of apertures of 30-50 nm, facilitating the mass-fabrication of apertured tip structures that can be used in a combined force/near-field optical microscope. Finally, possible future developments are outlined.

AB - Several approaches are described with the aim of producing near-field optical probes with improved properties. Focused ion beam milling allows the fabrication of small apertures in a controlled fashion, resulting in probes with excellent polarization properties and increased transmission. Microfabrication processes are described that allow the production of apertures of 30-50 nm, facilitating the mass-fabrication of apertured tip structures that can be used in a combined force/near-field optical microscope. Finally, possible future developments are outlined.

KW - Aperture formation

KW - Focused ion beam milling

KW - Microfabricated tips

KW - Near- field optical probes

KW - Polarization contrast

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Towards better scanning near-field optical microscopy probes - Progress and new developments

Abstract

Keywords

ASJC Scopus subject areas

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