Abstract
Several approaches are described with the aim of producing near-field optical probes with improved properties. Focused ion beam milling allows the fabrication of small apertures in a controlled fashion, resulting in probes with excellent polarization properties and increased transmission. Microfabrication processes are described that allow the production of apertures of 30-50 nm, facilitating the mass-fabrication of apertured tip structures that can be used in a combined force/near-field optical microscope. Finally, possible future developments are outlined.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 365-368 |
| Number of pages | 4 |
| Journal | Journal of Microscopy |
| Volume | 194 |
| Issue number | 2-3 |
| DOIs | |
| State | Published - 1999 |
| Externally published | Yes |
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Keywords
- Aperture formation
- Focused ion beam milling
- Microfabricated tips
- Near- field optical probes
- Polarization contrast
ASJC Scopus subject areas
- Instrumentation
Cite this
Towards better scanning near-field optical microscopy probes - Progress and new developments. / Heinzelmann, H.; Freyland, J. M.; Eckert, R.; Huser, Thomas R; Schürmann, G.; Noell, W.; Staufers, U.; De Rooij, N. F.
In: Journal of Microscopy, Vol. 194, No. 2-3, 1999, p. 365-368.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Towards better scanning near-field optical microscopy probes - Progress and new developments
AU - Heinzelmann, H.
AU - Freyland, J. M.
AU - Eckert, R.
AU - Huser, Thomas R
AU - Schürmann, G.
AU - Noell, W.
AU - Staufers, U.
AU - De Rooij, N. F.
PY - 1999
Y1 - 1999
N2 - Several approaches are described with the aim of producing near-field optical probes with improved properties. Focused ion beam milling allows the fabrication of small apertures in a controlled fashion, resulting in probes with excellent polarization properties and increased transmission. Microfabrication processes are described that allow the production of apertures of 30-50 nm, facilitating the mass-fabrication of apertured tip structures that can be used in a combined force/near-field optical microscope. Finally, possible future developments are outlined.
AB - Several approaches are described with the aim of producing near-field optical probes with improved properties. Focused ion beam milling allows the fabrication of small apertures in a controlled fashion, resulting in probes with excellent polarization properties and increased transmission. Microfabrication processes are described that allow the production of apertures of 30-50 nm, facilitating the mass-fabrication of apertured tip structures that can be used in a combined force/near-field optical microscope. Finally, possible future developments are outlined.
KW - Aperture formation
KW - Focused ion beam milling
KW - Microfabricated tips
KW - Near- field optical probes
KW - Polarization contrast
UR - http://www.scopus.com/inward/record.url?scp=0032988743&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0032988743&partnerID=8YFLogxK
U2 - 10.1046/j.1365-2818.1999.00567.x
DO - 10.1046/j.1365-2818.1999.00567.x
M3 - Article
C2 - 11388268
AN - SCOPUS:0032988743
VL - 194
SP - 365
EP - 368
JO - Journal of Microscopy
JF - Journal of Microscopy
SN - 0022-2720
IS - 2-3
ER -