Abstract
X-ray microtomography enables three-dimensional imaging at sub-micron resolution with elemental and chemical state contrast. The 1 - 4 KeV energy region is promising for microtomography of biological, microelectronics, and materials sciences specimens. To capitalize on this potential, we are constructing a tomographic scanning x-ray microscope for 1 - 4 KeV x rays on a spherical grating monochromator beamline at the advanced photon source. The microscope, which uses zone plate optics, has an anticipated spatial resolution of 100 nm and an energy resolution of better than 1 eV.
| Original language | English (US) |
|---|---|
| Title of host publication | Proceedings of SPIE - The International Society for Optical Engineering |
| Pages | 217-220 |
| Number of pages | 4 |
| Volume | 2516 |
| State | Published - 1995 |
| Externally published | Yes |
| Event | X-Ray Microbeam Technology and Applications - San Diego, CA, USA Duration: Jul 11 1995 → Jul 12 1995 |
Other
| Other | X-Ray Microbeam Technology and Applications |
|---|---|
| City | San Diego, CA, USA |
| Period | 7/11/95 → 7/12/95 |
ASJC Scopus subject areas
- Electrical and Electronic Engineering
- Condensed Matter Physics