Tomographic scanning microscope for 1 to 4-KeV xrays

Ian McNulty, Yi P. Feng, Waleed S. Haddad, James E. Trebes

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Scopus citations

Abstract

X-ray microtomography enables three-dimensional imaging at sub-micron resolution with elemental and chemical state contrast. The 1 - 4 KeV energy region is promising for microtomography of biological, microelectronics, and materials sciences specimens. To capitalize on this potential, we are constructing a tomographic scanning x-ray microscope for 1 - 4 KeV x rays on a spherical grating monochromator beamline at the advanced photon source. The microscope, which uses zone plate optics, has an anticipated spatial resolution of 100 nm and an energy resolution of better than 1 eV.

Original languageEnglish (US)
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
Pages217-220
Number of pages4
Volume2516
StatePublished - 1995
Externally publishedYes
EventX-Ray Microbeam Technology and Applications - San Diego, CA, USA
Duration: Jul 11 1995Jul 12 1995

Other

OtherX-Ray Microbeam Technology and Applications
CitySan Diego, CA, USA
Period7/11/957/12/95

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

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