Three-Dimensional Nanostructure Construction via Nanografting

Positive and Negative Pattern Transfer

Jun Fu Liu, Sylvain Cruchon-Dupeyrat, Jayne C. Garno, Jane Frommer, Gang-yu Liu

Research output: Contribution to journalArticle

66 Citations (Scopus)

Abstract

Three-dimensional nanostructures can be constructed using scanning probe lithography in combination with selective surface reactions. This letter introduces a successful approach using AFM-based nanografting to produce two-dimensional nanopatterns within self-assembled monolayer resists. These nanopatterns serve as an anchor to construct nanostructures in the third dimension via surface reactions. In this way, the nanometer-scale 20 pattern is transferred to chemically distinct 3D nanostructures. This approach offers the advantages of high spatial precision and selectivity in pattern transfer.

Original languageEnglish (US)
Pages (from-to)937-940
Number of pages4
JournalNano Letters
Volume2
Issue number9
DOIs
StatePublished - Sep 2002

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surface reactions
Nanostructures
Surface reactions
selective surfaces
lithography
selectivity
atomic force microscopy
Self assembled monolayers
Anchors
Lithography
scanning
probes
Scanning

ASJC Scopus subject areas

  • Materials Science(all)

Cite this

Three-Dimensional Nanostructure Construction via Nanografting : Positive and Negative Pattern Transfer. / Liu, Jun Fu; Cruchon-Dupeyrat, Sylvain; Garno, Jayne C.; Frommer, Jane; Liu, Gang-yu.

In: Nano Letters, Vol. 2, No. 9, 09.2002, p. 937-940.

Research output: Contribution to journalArticle

Liu, Jun Fu ; Cruchon-Dupeyrat, Sylvain ; Garno, Jayne C. ; Frommer, Jane ; Liu, Gang-yu. / Three-Dimensional Nanostructure Construction via Nanografting : Positive and Negative Pattern Transfer. In: Nano Letters. 2002 ; Vol. 2, No. 9. pp. 937-940.
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