Three-Dimensional Nanostructure Construction via Nanografting: Positive and Negative Pattern Transfer

Jun Fu Liu, Sylvain Cruchon-Dupeyrat, Jayne C. Garno, Jane Frommer, Gang-yu Liu

Research output: Contribution to journalArticle

66 Scopus citations

Abstract

Three-dimensional nanostructures can be constructed using scanning probe lithography in combination with selective surface reactions. This letter introduces a successful approach using AFM-based nanografting to produce two-dimensional nanopatterns within self-assembled monolayer resists. These nanopatterns serve as an anchor to construct nanostructures in the third dimension via surface reactions. In this way, the nanometer-scale 20 pattern is transferred to chemically distinct 3D nanostructures. This approach offers the advantages of high spatial precision and selectivity in pattern transfer.

Original languageEnglish (US)
Pages (from-to)937-940
Number of pages4
JournalNano Letters
Volume2
Issue number9
DOIs
StatePublished - Sep 2002

ASJC Scopus subject areas

  • Materials Science(all)

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