Thermo-mechanical and size-dependent behavior of freestanding AuAg and nanoporous-Au beams

Erkin Seker, Jianzhong Zhu, Hilary Bart-Smith, Matthew Begley, Robert Kelly, Giovanni Zangari, Michael L. Reed

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations


Nanoporous gold (np-Au), produced by selectively removing silver from an AuAg alloy, has recently gained considerable attention from the scientific community. Biocompatibility, chemical inertness, increased surface area, relatively low elastic modulus, and ease of synthesis make np-Au an important candidate for biomedical, catalytic, and MEMS applications. Np-Au films also offer substantial ground for theoretical and empirical research, including mechanical characterization, fracture mechanics, and porosity evolution. Even though a significant effort has been directed towards exploring blanket np-Au films (i.e., foils, strips), to our knowledge no work has been done on fabricating or investigating freestanding np-Au structures (i.e., microbeams, cantilevers). Recently we have developed techniques to create freestanding clamped npAu beams with widths from 5 to 40 microns and lengths from 20 to 500 microns. The percentage yield was more than 97% for 2880 beams on a 2-inch wafer. A critical step in the fabrication process, necessary to prevent tensile failure of the beams during dealloying, is a thermal heat treatment prior to dealloying. The study of thermal treatment of beams at temperatures between 100°C and 600°C prior to dealloying revealed three distinct beam behavior regimes, namely quasi-elastic buckling, plastic buckling, and material interdiffusion. This paper will present the preliminary results from thermal treatment experiments particularly focusing on how beam dimensions affect percentage yield and beam fracture.

Original languageEnglish (US)
Title of host publicationSize Effects in the Deformation of Materials
Subtitle of host publicationExperiments and Modeling
Number of pages6
StatePublished - Dec 1 2006
Externally publishedYes
Event2006 MRS Fall Meeting - Boston, MA, United States
Duration: Nov 27 2006Dec 1 2006


Other2006 MRS Fall Meeting
Country/TerritoryUnited States
CityBoston, MA

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering


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