The effects of post-fabrication annealing on the mechanical properties of freestanding nanoporous gold structures

Erkin Seker, John T. Gaskins, Hilary Bart-Smith, Jianzhong Zhu, Michael L. Reed, Giovanni Zangari, Robert Kelly, Matthew R. Begley

Research output: Contribution to journalArticle

84 Scopus citations

Abstract

The elastic modulus, residual stress and porosity of nanoporous gold are reported for freestanding microfabricated beams and blanket films on substrates. After fabrication, the nanoporous samples were annealed at various temperatures (up to 400 °C) to induce changes in porosity and mechanical properties. The porosity of the samples was characterized by digital processing of scanning electron microscopy images; mechanical properties were measured using combinations of freestanding beam deflection, wafer curvature and nanoindentation. The relative density of all sample geometries increased as the annealing temperature was increased. However, the evolution of the average pore size (with annealing) depended on the geometry, and hence on the boundary conditions, of the specimen. Differences in porosity evolution were reflected in the mechanical property measurements: while the elastic modulus and residual stress generally increased with increasing annealing temperature (due to densification), pore coalescence in films on substrates leads to the most dramatic changes.

Original languageEnglish (US)
Pages (from-to)4593-4602
Number of pages10
JournalActa Materialia
Volume55
Issue number14
DOIs
StatePublished - Aug 1 2007
Externally publishedYes

Keywords

  • Annealing
  • Porous material
  • Self-organization and patterning
  • Thin films

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Ceramics and Composites
  • Polymers and Plastics
  • Metals and Alloys

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    Seker, E., Gaskins, J. T., Bart-Smith, H., Zhu, J., Reed, M. L., Zangari, G., Kelly, R., & Begley, M. R. (2007). The effects of post-fabrication annealing on the mechanical properties of freestanding nanoporous gold structures. Acta Materialia, 55(14), 4593-4602. https://doi.org/10.1016/j.actamat.2007.03.018