The effects of post-fabrication annealing on the mechanical properties of freestanding nanoporous gold structures

Erkin Seker, John T. Gaskins, Hilary Bart-Smith, Jianzhong Zhu, Michael L. Reed, Giovanni Zangari, Robert Kelly, Matthew R. Begley

Research output: Contribution to journalArticle

83 Citations (Scopus)

Abstract

The elastic modulus, residual stress and porosity of nanoporous gold are reported for freestanding microfabricated beams and blanket films on substrates. After fabrication, the nanoporous samples were annealed at various temperatures (up to 400 °C) to induce changes in porosity and mechanical properties. The porosity of the samples was characterized by digital processing of scanning electron microscopy images; mechanical properties were measured using combinations of freestanding beam deflection, wafer curvature and nanoindentation. The relative density of all sample geometries increased as the annealing temperature was increased. However, the evolution of the average pore size (with annealing) depended on the geometry, and hence on the boundary conditions, of the specimen. Differences in porosity evolution were reflected in the mechanical property measurements: while the elastic modulus and residual stress generally increased with increasing annealing temperature (due to densification), pore coalescence in films on substrates leads to the most dramatic changes.

Original languageEnglish (US)
Pages (from-to)4593-4602
Number of pages10
JournalActa Materialia
Volume55
Issue number14
DOIs
StatePublished - Aug 1 2007
Externally publishedYes

Fingerprint

Gold
Porosity
Annealing
Fabrication
Mechanical properties
Residual stresses
Elastic moduli
Geometry
Substrates
Nanoindentation
Digital signal processing
Coalescence
Densification
Temperature
Pore size
Boundary conditions
Scanning electron microscopy

Keywords

  • Annealing
  • Porous material
  • Self-organization and patterning
  • Thin films

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Ceramics and Composites
  • Polymers and Plastics
  • Metals and Alloys

Cite this

The effects of post-fabrication annealing on the mechanical properties of freestanding nanoporous gold structures. / Seker, Erkin; Gaskins, John T.; Bart-Smith, Hilary; Zhu, Jianzhong; Reed, Michael L.; Zangari, Giovanni; Kelly, Robert; Begley, Matthew R.

In: Acta Materialia, Vol. 55, No. 14, 01.08.2007, p. 4593-4602.

Research output: Contribution to journalArticle

Seker, E, Gaskins, JT, Bart-Smith, H, Zhu, J, Reed, ML, Zangari, G, Kelly, R & Begley, MR 2007, 'The effects of post-fabrication annealing on the mechanical properties of freestanding nanoporous gold structures', Acta Materialia, vol. 55, no. 14, pp. 4593-4602. https://doi.org/10.1016/j.actamat.2007.03.018
Seker, Erkin ; Gaskins, John T. ; Bart-Smith, Hilary ; Zhu, Jianzhong ; Reed, Michael L. ; Zangari, Giovanni ; Kelly, Robert ; Begley, Matthew R. / The effects of post-fabrication annealing on the mechanical properties of freestanding nanoporous gold structures. In: Acta Materialia. 2007 ; Vol. 55, No. 14. pp. 4593-4602.
@article{3d29cde0df35498ab059e2dcad67a051,
title = "The effects of post-fabrication annealing on the mechanical properties of freestanding nanoporous gold structures",
abstract = "The elastic modulus, residual stress and porosity of nanoporous gold are reported for freestanding microfabricated beams and blanket films on substrates. After fabrication, the nanoporous samples were annealed at various temperatures (up to 400 °C) to induce changes in porosity and mechanical properties. The porosity of the samples was characterized by digital processing of scanning electron microscopy images; mechanical properties were measured using combinations of freestanding beam deflection, wafer curvature and nanoindentation. The relative density of all sample geometries increased as the annealing temperature was increased. However, the evolution of the average pore size (with annealing) depended on the geometry, and hence on the boundary conditions, of the specimen. Differences in porosity evolution were reflected in the mechanical property measurements: while the elastic modulus and residual stress generally increased with increasing annealing temperature (due to densification), pore coalescence in films on substrates leads to the most dramatic changes.",
keywords = "Annealing, Porous material, Self-organization and patterning, Thin films",
author = "Erkin Seker and Gaskins, {John T.} and Hilary Bart-Smith and Jianzhong Zhu and Reed, {Michael L.} and Giovanni Zangari and Robert Kelly and Begley, {Matthew R.}",
year = "2007",
month = "8",
day = "1",
doi = "10.1016/j.actamat.2007.03.018",
language = "English (US)",
volume = "55",
pages = "4593--4602",
journal = "Acta Materialia",
issn = "1359-6454",
publisher = "Elsevier Limited",
number = "14",

}

TY - JOUR

T1 - The effects of post-fabrication annealing on the mechanical properties of freestanding nanoporous gold structures

AU - Seker, Erkin

AU - Gaskins, John T.

AU - Bart-Smith, Hilary

AU - Zhu, Jianzhong

AU - Reed, Michael L.

AU - Zangari, Giovanni

AU - Kelly, Robert

AU - Begley, Matthew R.

PY - 2007/8/1

Y1 - 2007/8/1

N2 - The elastic modulus, residual stress and porosity of nanoporous gold are reported for freestanding microfabricated beams and blanket films on substrates. After fabrication, the nanoporous samples were annealed at various temperatures (up to 400 °C) to induce changes in porosity and mechanical properties. The porosity of the samples was characterized by digital processing of scanning electron microscopy images; mechanical properties were measured using combinations of freestanding beam deflection, wafer curvature and nanoindentation. The relative density of all sample geometries increased as the annealing temperature was increased. However, the evolution of the average pore size (with annealing) depended on the geometry, and hence on the boundary conditions, of the specimen. Differences in porosity evolution were reflected in the mechanical property measurements: while the elastic modulus and residual stress generally increased with increasing annealing temperature (due to densification), pore coalescence in films on substrates leads to the most dramatic changes.

AB - The elastic modulus, residual stress and porosity of nanoporous gold are reported for freestanding microfabricated beams and blanket films on substrates. After fabrication, the nanoporous samples were annealed at various temperatures (up to 400 °C) to induce changes in porosity and mechanical properties. The porosity of the samples was characterized by digital processing of scanning electron microscopy images; mechanical properties were measured using combinations of freestanding beam deflection, wafer curvature and nanoindentation. The relative density of all sample geometries increased as the annealing temperature was increased. However, the evolution of the average pore size (with annealing) depended on the geometry, and hence on the boundary conditions, of the specimen. Differences in porosity evolution were reflected in the mechanical property measurements: while the elastic modulus and residual stress generally increased with increasing annealing temperature (due to densification), pore coalescence in films on substrates leads to the most dramatic changes.

KW - Annealing

KW - Porous material

KW - Self-organization and patterning

KW - Thin films

UR - http://www.scopus.com/inward/record.url?scp=34447332493&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=34447332493&partnerID=8YFLogxK

U2 - 10.1016/j.actamat.2007.03.018

DO - 10.1016/j.actamat.2007.03.018

M3 - Article

AN - SCOPUS:34447332493

VL - 55

SP - 4593

EP - 4602

JO - Acta Materialia

JF - Acta Materialia

SN - 1359-6454

IS - 14

ER -