Surface microfluidics fabricated by superhydrophobic nanocomposite photoresist

Lingfei Hong, Tingrui Pan

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Scopus citations

Abstract

Surface microfluidics can be of potential use in a variety of emerging applications, including biological and chemical analysis, cellular detection and manipulation, and high-throughput pharmaceutical screening. In comparison with the conventional closed-channel microfluidic system, surface microfluidics shows the distinct advantages of simple construction, direct fluidic connection, no cavitation or interphase obstruction, no optical barrier, and reusability. In this paper, we present the first surface microfluidic networks microfabricated by a singlestep photolithographic process using a novel superhydrophobic photosensitive nanocomposite. The superhydrophobic photoresist incorporates PTFE nanoparticles into a photosensitive SU-8 matrix, in which superhydrophobicity (contact angle of 160° ) is primarily contributed by the extremely low chemical energy and nanotopology of PTFE nanoparticles, while the SU-8 matrix offers photopatternability (lithographic resolution of 10μ m) and substrate adhesion. Furthermore, surface microfluidic pumps self-propelled by surface tension force have been fabricated and characterized to demonstrate the applicability of the novel nanocomposite material.

Original languageEnglish (US)
Title of host publicationMEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest
Pages420-423
Number of pages4
DOIs
StatePublished - Jun 1 2010
Event23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010 - Hong Kong, China
Duration: Jan 24 2010Jan 28 2010

Other

Other23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010
CountryChina
CityHong Kong
Period1/24/101/28/10

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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  • Cite this

    Hong, L., & Pan, T. (2010). Surface microfluidics fabricated by superhydrophobic nanocomposite photoresist. In MEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest (pp. 420-423). [5442477] https://doi.org/10.1109/MEMSYS.2010.5442477