Abstract
High quality surfaces of fused silica optical materials were studied using microscopic fluorescence imaging as well as Raman and emission micro-spectroscopy. For as-polished surfaces optically active defect formations were detected on the surface of the material which vary in geometry, relative intensity and concentration depending on the polishing process. A partial correlation of these defects with subsequent laser damage sites was indicated. Following laser-induced damage the Raman and photoluminescence spectra indicated extensive material modification within the damage site. Emission spectra show at least three characteristic luminescence bands centered at 1.9 eV (650 nm), 2.2 eV (560 nm) and approximately 4.7 eV (approximately 440 nm). Raman scattering indicates that laser irradiation leads to compaction.
Original language | English (US) |
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Title of host publication | Proceedings of SPIE - The International Society for Optical Engineering |
Publisher | Society of Photo-Optical Instrumentation Engineers |
Pages | 316-320 |
Number of pages | 5 |
Volume | 3933 |
State | Published - 2000 |
Externally published | Yes |
Event | Laser Applications in Microelectronic and Optoelectronic Manufacturing V - San Jose, CA, USA Duration: Jan 24 2000 → Jan 26 2000 |
Other
Other | Laser Applications in Microelectronic and Optoelectronic Manufacturing V |
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City | San Jose, CA, USA |
Period | 1/24/00 → 1/26/00 |
ASJC Scopus subject areas
- Electrical and Electronic Engineering
- Condensed Matter Physics