Soft x-ray scanning microtomography with submicrometer resolution

I. McNulty, W. S. Haddad, J. E. Trebes, E. H. Anderson

Research output: Contribution to journalArticle

16 Citations (Scopus)

Abstract

Scanning soft x-ray microtomography was used to obtain high-resolution three-dimensional images of a microfabricated test object. Using a special rotation stage mounted on the scanning transmission x-ray microscope at the X1A beamline at the National Synchrotron Light Source, we recorded nine two-dimensional projections of the 3D test object over an angular range of -50° to +55°. The x-ray wavelength was 3.6 nm and the radiation dose to the object per projection was approximately 2×106 Gy. The object consisted of two gold patterns supported on transparent silicon nitride membranes, separated by 4.75 μm, with 100- to 300-nm-wide and 65-nm-thick features. We reconstructed a volumetric data set of the test object from the two-dimensional projections using an algebraic reconstruction technique algorithm. Features of the test object were resolved to ∼100 nm in transverse and longitudinal extent with low artifact in three-dimensional images rendered from the volumetric set.

Original languageEnglish (US)
Pages (from-to)1431-1433
Number of pages3
JournalReview of Scientific Instruments
Volume66
Issue number2
DOIs
StatePublished - 1995
Externally publishedYes

Fingerprint

Scanning
X rays
scanning
projection
x rays
Synchrotrons
Silicon nitride
Dosimetry
Light sources
Microscopes
Gold
silicon nitrides
Membranes
artifacts
Wavelength
light sources
synchrotrons
microscopes
gold
membranes

ASJC Scopus subject areas

  • Instrumentation
  • Physics and Astronomy (miscellaneous)

Cite this

McNulty, I., Haddad, W. S., Trebes, J. E., & Anderson, E. H. (1995). Soft x-ray scanning microtomography with submicrometer resolution. Review of Scientific Instruments, 66(2), 1431-1433. https://doi.org/10.1063/1.1145930

Soft x-ray scanning microtomography with submicrometer resolution. / McNulty, I.; Haddad, W. S.; Trebes, J. E.; Anderson, E. H.

In: Review of Scientific Instruments, Vol. 66, No. 2, 1995, p. 1431-1433.

Research output: Contribution to journalArticle

McNulty, I, Haddad, WS, Trebes, JE & Anderson, EH 1995, 'Soft x-ray scanning microtomography with submicrometer resolution', Review of Scientific Instruments, vol. 66, no. 2, pp. 1431-1433. https://doi.org/10.1063/1.1145930
McNulty, I. ; Haddad, W. S. ; Trebes, J. E. ; Anderson, E. H. / Soft x-ray scanning microtomography with submicrometer resolution. In: Review of Scientific Instruments. 1995 ; Vol. 66, No. 2. pp. 1431-1433.
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