Soft x-ray scanning microtomography with submicrometer resolution

I. McNulty, W. S. Haddad, J. E. Trebes, E. H. Anderson

Research output: Contribution to journalArticlepeer-review

16 Scopus citations


Scanning soft x-ray microtomography was used to obtain high-resolution three-dimensional images of a microfabricated test object. Using a special rotation stage mounted on the scanning transmission x-ray microscope at the X1A beamline at the National Synchrotron Light Source, we recorded nine two-dimensional projections of the 3D test object over an angular range of -50° to +55°. The x-ray wavelength was 3.6 nm and the radiation dose to the object per projection was approximately 2×106 Gy. The object consisted of two gold patterns supported on transparent silicon nitride membranes, separated by 4.75 μm, with 100- to 300-nm-wide and 65-nm-thick features. We reconstructed a volumetric data set of the test object from the two-dimensional projections using an algebraic reconstruction technique algorithm. Features of the test object were resolved to ∼100 nm in transverse and longitudinal extent with low artifact in three-dimensional images rendered from the volumetric set.

Original languageEnglish (US)
Pages (from-to)1431-1433
Number of pages3
JournalReview of Scientific Instruments
Issue number2
StatePublished - 1995
Externally publishedYes

ASJC Scopus subject areas

  • Instrumentation
  • Physics and Astronomy (miscellaneous)


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