Remotely adjustable check-valves with an electrochemical release mechanism for implantable biomedical microsystem

Tingrui Pan, Antonio Baldi, Babak Ziaie

Research output: Contribution to journalConference article

1 Scopus citations

Abstract

In this paper, we present two remotely adjustable check-valves with an electrochemical release mechanism for implantable biomedical microsystems. Using these valves, one can vary the opening pressure set-point and flow resistance over a period of time. In the first design, an array of remotely addressable valves with a SU-8 structural polymer layer deposited on the top of a gold sacrificial layer act as the micromachined check-valve. In an alternative design, the set point is changed by varying the length of a cantilever-beam. The adjustable cantilever-beam structure is fabricated by gold thermo-compression bond of a thin silicon wafer over a glass substrate. The evaporated gold forms anchors on the silicon and strips on the glass substrate. Adjustment of both microvalves is based on electrochemical dissolution of gold using a constant DC current obtained via a telemetry link. A current density of 35mA/cm 2 is used to activate the valves. Both gravity and syringe-pump driven flow are used to characterize the valve performance. The multi-stage fluidic performance (e.g. flow resistance and opening pressure) is clearly demonstrated.

Original languageEnglish (US)
Pages (from-to)2658-2661
Number of pages4
JournalAnnual International Conference of the IEEE Engineering in Medicine and Biology - Proceedings
Volume26 IV
StatePublished - Dec 1 2004
Externally publishedYes
EventConference Proceedings - 26th Annual International Conference of the IEEE Engineering in Medicine and Biology Society, EMBC 2004 - San Francisco, CA, United States
Duration: Sep 1 2004Sep 5 2004

Keywords

  • Electrochemical Release
  • Microvalves
  • SU-8
  • Thermo-compression Bond

ASJC Scopus subject areas

  • Signal Processing
  • Biomedical Engineering
  • Computer Vision and Pattern Recognition
  • Health Informatics

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