Reliable determination of kinetics parameters of adatoms in thin-film epitaxy

X. D. Zhu

Research output: Contribution to journalArticle

2 Scopus citations

Abstract

We show that in an interrupted step-flow epitaxy on a vicinal surface, the decay of adatom monomer density on terraces after deposition often has a simple dependence on the monomer diffusion coefficient D, the step-edge sticking probability S, and the extra step-edge energy barrier Estep (Schwoebel-Ehrlich barrier). One may reliably determine these kinetics parameters by examining the dependence of the decay rate constant on the average terrace width and the temperature. Such a decay can be monitored by either reflection high-energy electron diffraction or optical reflectance difference techniques.

Original languageEnglish (US)
Pages (from-to)10975-10980
Number of pages6
JournalPhysical Review B - Condensed Matter and Materials Physics
Volume58
Issue number16
StatePublished - Oct 15 1998

ASJC Scopus subject areas

  • Condensed Matter Physics

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