Printing mems: From a single flexible polyimide film to three-dimensional integrated microfluidics

W. Wang, H. Cong, Z. Qiu, S. Zhao, H. Zhu, Alexander Revzin, T. Pan

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

With the major advances in soft lithography and polymeric materials, use of microfluidic lab-on-a-chip device has attracted tremendous attention recently. A simple and fast micromachining process is highly in demand to prototype such a device. In this paper, we first reported an out-of-cleanroom printing-based integrated microfabrication process, referred to as printing microelectromechanical system (Printing MEMS). Using the Printing MEMS process, we demonstrated the potential to accomplish an entire design-to-fabrication cycle within an hour, including 50 μm-resolution non-lithographic patterning, well-controlled polyimide etching, three-dimensional pattern alignment and multilayer wax fusion bonding. A microfluidic mixer was prepared by this method and tested for the process validation.

Original languageEnglish (US)
Title of host publication2008 Solid-State Sensors, Actuators, and Microsystems Workshop
EditorsLeland Spangler, Kimberly L. Turner
PublisherTransducer Research Foundation
Pages236-239
Number of pages4
ISBN (Electronic)9780964002494
StatePublished - Jan 1 2008
Event2008 Solid-State Sensors, Actuators, and Microsystems Workshop - Hilton Head Island, United States
Duration: Jun 1 2008Jun 5 2008

Publication series

NameTechnical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop

Conference

Conference2008 Solid-State Sensors, Actuators, and Microsystems Workshop
Country/TerritoryUnited States
CityHilton Head Island
Period6/1/086/5/08

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering
  • Hardware and Architecture

Fingerprint

Dive into the research topics of 'Printing mems: From a single flexible polyimide film to three-dimensional integrated microfluidics'. Together they form a unique fingerprint.

Cite this