Preparation and characterization of Al/Al2O3/Cu SIN tunnel junctions microfabricated with a full wafer process

J. P. Castle, M. F. Cunningham, B. Neuhauser, S. Golwala, F. P. Lipschultz, A. Barootkoob, O. B. Drury, Matthias Frank, J. Jochum, S. E. Labov, C. A. Meats, B. Sadoulet, A. Slepoy, D. A. Yale

Research output: Contribution to journal › Article

1 Citation (Scopus)

Abstract

We have developed a "full wafer" process for producing AI/A1203/Cu superconductor-insulator-normal (SIN) tunnel junctions for use as X-ray and phonon sensors. We describe microfabrication details and present I-V data.

Original languageEnglish (US)
Pages (from-to)2897-2898
Number of pages2
JournalCzechoslovak Journal of Physics
Volume46
Issue numberSUPPL. 5
DOIs
StatePublished - Dec 1 1996
Externally publishedYes

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tunnel junctions
insulators
wafers
preparation
sensors
x rays

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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Castle, J. P., Cunningham, M. F., Neuhauser, B., Golwala, S., Lipschultz, F. P., Barootkoob, A., ... Yale, D. A. (1996). Preparation and characterization of Al/Al2O3/Cu SIN tunnel junctions microfabricated with a full wafer process. Czechoslovak Journal of Physics, 46(SUPPL. 5), 2897-2898. https://doi.org/10.1007/BF02570435

Preparation and characterization of Al/Al2O3/Cu SIN tunnel junctions microfabricated with a full wafer process. / Castle, J. P.; Cunningham, M. F.; Neuhauser, B.; Golwala, S.; Lipschultz, F. P.; Barootkoob, A.; Drury, O. B.; Frank, Matthias; Jochum, J.; Labov, S. E.; Meats, C. A.; Sadoulet, B.; Slepoy, A.; Yale, D. A.

In: Czechoslovak Journal of Physics, Vol. 46, No. SUPPL. 5, 01.12.1996, p. 2897-2898.

Research output: Contribution to journal › Article

Castle, JP, Cunningham, MF, Neuhauser, B, Golwala, S, Lipschultz, FP, Barootkoob, A, Drury, OB, Frank, M, Jochum, J, Labov, SE, Meats, CA, Sadoulet, B, Slepoy, A & Yale, DA 1996, 'Preparation and characterization of Al/Al2O3/Cu SIN tunnel junctions microfabricated with a full wafer process', Czechoslovak Journal of Physics, vol. 46, no. SUPPL. 5, pp. 2897-2898. https://doi.org/10.1007/BF02570435
Castle JP, Cunningham MF, Neuhauser B, Golwala S, Lipschultz FP, Barootkoob A et al. Preparation and characterization of Al/Al2O3/Cu SIN tunnel junctions microfabricated with a full wafer process. Czechoslovak Journal of Physics. 1996 Dec 1;46(SUPPL. 5):2897-2898. https://doi.org/10.1007/BF02570435
Castle, J. P. ; Cunningham, M. F. ; Neuhauser, B. ; Golwala, S. ; Lipschultz, F. P. ; Barootkoob, A. ; Drury, O. B. ; Frank, Matthias ; Jochum, J. ; Labov, S. E. ; Meats, C. A. ; Sadoulet, B. ; Slepoy, A. ; Yale, D. A. / Preparation and characterization of Al/Al2O3/Cu SIN tunnel junctions microfabricated with a full wafer process. In: Czechoslovak Journal of Physics. 1996 ; Vol. 46, No. SUPPL. 5. pp. 2897-2898.
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AU - Labov, S. E.

AU - Meats, C. A.

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