Preparation and characterization of Al/Al2O3/Cu SIN tunnel junctions microfabricated with a full wafer process

J. P. Castle; M. F. Cunningham; B. Neuhauser; S. Golwala; F. P. Lipschultz; A. Barootkoob; O. B. Drury; Matthias Frank; J. Jochum; S. E. Labov; C. A. Meats; B. Sadoulet; A. Slepoy; D. A. Yale

doi:10.1007/BF02570435

Preparation and characterization of Al/Al₂O₃/Cu SIN tunnel junctions microfabricated with a full wafer process

J. P. Castle, M. F. Cunningham, B. Neuhauser, S. Golwala, F. P. Lipschultz, A. Barootkoob, O. B. Drury, Matthias Frank, J. Jochum, S. E. Labov, C. A. Meats, B. Sadoulet, A. Slepoy, D. A. Yale

Research output: Contribution to journal › Article › peer-review

1 Scopus citations

Abstract

We have developed a "full wafer" process for producing AI/A1₂0₃/Cu superconductor-insulator-normal (SIN) tunnel junctions for use as X-ray and phonon sensors. We describe microfabrication details and present I-V data.

Original language	English (US)
Pages (from-to)	2897-2898
Number of pages	2
Journal	Czechoslovak Journal of Physics
Volume	46
Issue number	SUPPL. 5
DOIs	https://doi.org/10.1007/BF02570435
State	Published - Dec 1 1996
Externally published	Yes

ASJC Scopus subject areas

Physics and Astronomy(all)

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Castle, J. P., Cunningham, M. F., Neuhauser, B., Golwala, S., Lipschultz, F. P., Barootkoob, A., Drury, O. B., Frank, M., Jochum, J., Labov, S. E., Meats, C. A., Sadoulet, B., Slepoy, A., & Yale, D. A. (1996). Preparation and characterization of Al/Al₂O₃/Cu SIN tunnel junctions microfabricated with a full wafer process. Czechoslovak Journal of Physics, 46(SUPPL. 5), 2897-2898. https://doi.org/10.1007/BF02570435

Preparation and characterization of Al/Al₂O₃/Cu SIN tunnel junctions microfabricated with a full wafer process. / Castle, J. P.; Cunningham, M. F.; Neuhauser, B.; Golwala, S.; Lipschultz, F. P.; Barootkoob, A.; Drury, O. B.; Frank, Matthias; Jochum, J.; Labov, S. E.; Meats, C. A.; Sadoulet, B.; Slepoy, A.; Yale, D. A.

In: Czechoslovak Journal of Physics, Vol. 46, No. SUPPL. 5, 01.12.1996, p. 2897-2898.

Research output: Contribution to journal › Article › peer-review

Castle, JP, Cunningham, MF, Neuhauser, B, Golwala, S, Lipschultz, FP, Barootkoob, A, Drury, OB, Frank, M, Jochum, J, Labov, SE, Meats, CA, Sadoulet, B, Slepoy, A & Yale, DA 1996, 'Preparation and characterization of Al/Al₂O₃/Cu SIN tunnel junctions microfabricated with a full wafer process', Czechoslovak Journal of Physics, vol. 46, no. SUPPL. 5, pp. 2897-2898. https://doi.org/10.1007/BF02570435

Castle, J. P. ; Cunningham, M. F. ; Neuhauser, B. ; Golwala, S. ; Lipschultz, F. P. ; Barootkoob, A. ; Drury, O. B. ; Frank, Matthias ; Jochum, J. ; Labov, S. E. ; Meats, C. A. ; Sadoulet, B. ; Slepoy, A. ; Yale, D. A. / Preparation and characterization of Al/Al₂O₃/Cu SIN tunnel junctions microfabricated with a full wafer process. In: Czechoslovak Journal of Physics. 1996 ; Vol. 46, No. SUPPL. 5. pp. 2897-2898.

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Preparation and characterization of Al/Al₂O₃/Cu SIN tunnel junctions microfabricated with a full wafer process

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