Preparation and characterization of Al/Al2O3/Cu SIN tunnel junctions microfabricated with a full wafer process

J. P. Castle, M. F. Cunningham, B. Neuhauser, S. Golwala, F. P. Lipschultz, A. Barootkoob, O. B. Drury, Matthias Frank, J. Jochum, S. E. Labov, C. A. Meats, B. Sadoulet, A. Slepoy, D. A. Yale

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

We have developed a "full wafer" process for producing AI/A1203/Cu superconductor-insulator-normal (SIN) tunnel junctions for use as X-ray and phonon sensors. We describe microfabrication details and present I-V data.

Original languageEnglish (US)
Pages (from-to)2897-2898
Number of pages2
JournalCzechoslovak Journal of Physics
Volume46
Issue numberSUPPL. 5
DOIs
StatePublished - Dec 1 1996
Externally publishedYes

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tunnel junctions
insulators
wafers
preparation
sensors
x rays

ASJC Scopus subject areas

  • Physics and Astronomy(all)

Cite this

Castle, J. P., Cunningham, M. F., Neuhauser, B., Golwala, S., Lipschultz, F. P., Barootkoob, A., ... Yale, D. A. (1996). Preparation and characterization of Al/Al2O3/Cu SIN tunnel junctions microfabricated with a full wafer process. Czechoslovak Journal of Physics, 46(SUPPL. 5), 2897-2898. https://doi.org/10.1007/BF02570435

Preparation and characterization of Al/Al2O3/Cu SIN tunnel junctions microfabricated with a full wafer process. / Castle, J. P.; Cunningham, M. F.; Neuhauser, B.; Golwala, S.; Lipschultz, F. P.; Barootkoob, A.; Drury, O. B.; Frank, Matthias; Jochum, J.; Labov, S. E.; Meats, C. A.; Sadoulet, B.; Slepoy, A.; Yale, D. A.

In: Czechoslovak Journal of Physics, Vol. 46, No. SUPPL. 5, 01.12.1996, p. 2897-2898.

Research output: Contribution to journalArticle

Castle, JP, Cunningham, MF, Neuhauser, B, Golwala, S, Lipschultz, FP, Barootkoob, A, Drury, OB, Frank, M, Jochum, J, Labov, SE, Meats, CA, Sadoulet, B, Slepoy, A & Yale, DA 1996, 'Preparation and characterization of Al/Al2O3/Cu SIN tunnel junctions microfabricated with a full wafer process', Czechoslovak Journal of Physics, vol. 46, no. SUPPL. 5, pp. 2897-2898. https://doi.org/10.1007/BF02570435
Castle JP, Cunningham MF, Neuhauser B, Golwala S, Lipschultz FP, Barootkoob A et al. Preparation and characterization of Al/Al2O3/Cu SIN tunnel junctions microfabricated with a full wafer process. Czechoslovak Journal of Physics. 1996 Dec 1;46(SUPPL. 5):2897-2898. https://doi.org/10.1007/BF02570435
Castle, J. P. ; Cunningham, M. F. ; Neuhauser, B. ; Golwala, S. ; Lipschultz, F. P. ; Barootkoob, A. ; Drury, O. B. ; Frank, Matthias ; Jochum, J. ; Labov, S. E. ; Meats, C. A. ; Sadoulet, B. ; Slepoy, A. ; Yale, D. A. / Preparation and characterization of Al/Al2O3/Cu SIN tunnel junctions microfabricated with a full wafer process. In: Czechoslovak Journal of Physics. 1996 ; Vol. 46, No. SUPPL. 5. pp. 2897-2898.
@article{28584fe9f5d34c5fb0dc4a361cb0a7f9,
title = "Preparation and characterization of Al/Al2O3/Cu SIN tunnel junctions microfabricated with a full wafer process",
abstract = "We have developed a {"}full wafer{"} process for producing AI/A1203/Cu superconductor-insulator-normal (SIN) tunnel junctions for use as X-ray and phonon sensors. We describe microfabrication details and present I-V data.",
author = "Castle, {J. P.} and Cunningham, {M. F.} and B. Neuhauser and S. Golwala and Lipschultz, {F. P.} and A. Barootkoob and Drury, {O. B.} and Matthias Frank and J. Jochum and Labov, {S. E.} and Meats, {C. A.} and B. Sadoulet and A. Slepoy and Yale, {D. A.}",
year = "1996",
month = "12",
day = "1",
doi = "10.1007/BF02570435",
language = "English (US)",
volume = "46",
pages = "2897--2898",
journal = "Czechoslovak Journal of Physics",
issn = "0011-4626",
publisher = "Springer Netherlands",
number = "SUPPL. 5",

}

TY - JOUR

T1 - Preparation and characterization of Al/Al2O3/Cu SIN tunnel junctions microfabricated with a full wafer process

AU - Castle, J. P.

AU - Cunningham, M. F.

AU - Neuhauser, B.

AU - Golwala, S.

AU - Lipschultz, F. P.

AU - Barootkoob, A.

AU - Drury, O. B.

AU - Frank, Matthias

AU - Jochum, J.

AU - Labov, S. E.

AU - Meats, C. A.

AU - Sadoulet, B.

AU - Slepoy, A.

AU - Yale, D. A.

PY - 1996/12/1

Y1 - 1996/12/1

N2 - We have developed a "full wafer" process for producing AI/A1203/Cu superconductor-insulator-normal (SIN) tunnel junctions for use as X-ray and phonon sensors. We describe microfabrication details and present I-V data.

AB - We have developed a "full wafer" process for producing AI/A1203/Cu superconductor-insulator-normal (SIN) tunnel junctions for use as X-ray and phonon sensors. We describe microfabrication details and present I-V data.

UR - http://www.scopus.com/inward/record.url?scp=33748973292&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=33748973292&partnerID=8YFLogxK

U2 - 10.1007/BF02570435

DO - 10.1007/BF02570435

M3 - Article

AN - SCOPUS:33748973292

VL - 46

SP - 2897

EP - 2898

JO - Czechoslovak Journal of Physics

JF - Czechoslovak Journal of Physics

SN - 0011-4626

IS - SUPPL. 5

ER -