Abstract
We have developed a "full wafer" process for producing AI/A1203/Cu superconductor-insulator-normal (SIN) tunnel junctions for use as X-ray and phonon sensors. We describe microfabrication details and present I-V data.
Original language | English (US) |
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Pages (from-to) | 2897-2898 |
Number of pages | 2 |
Journal | Czechoslovak Journal of Physics |
Volume | 46 |
Issue number | SUPPL. 5 |
DOIs | |
State | Published - Dec 1 1996 |
Externally published | Yes |
ASJC Scopus subject areas
- Physics and Astronomy(all)