Preparation and characterization of Al/Al2O3/Cu SIN tunnel junctions microfabricated with a full wafer process

J. P. Castle, M. F. Cunningham, B. Neuhauser, S. Golwala, F. P. Lipschultz, A. Barootkoob, O. B. Drury, Matthias Frank, J. Jochum, S. E. Labov, C. A. Meats, B. Sadoulet, A. Slepoy, D. A. Yale

Research output: Contribution to journalArticlepeer-review

1 Scopus citations


We have developed a "full wafer" process for producing AI/A1203/Cu superconductor-insulator-normal (SIN) tunnel junctions for use as X-ray and phonon sensors. We describe microfabrication details and present I-V data.

Original languageEnglish (US)
Pages (from-to)2897-2898
Number of pages2
JournalCzechoslovak Journal of Physics
Issue numberSUPPL. 5
StatePublished - Dec 1 1996
Externally publishedYes

ASJC Scopus subject areas

  • Physics and Astronomy(all)


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