Preparation and characterization of Al/Al2O3/Cu SIN tunnel junctions microfabricated with a full wafer process

J. P. Castle; M. F. Cunningham; B. Neuhauser; S. Golwala; F. P. Lipschultz; A. Barootkoob; O. B. Drury; Matthias Frank; J. Jochum; S. E. Labov; C. A. Meats; B. Sadoulet; A. Slepoy; D. A. Yale

doi:10.1007/BF02570435

Preparation and characterization of Al/Al₂O₃/Cu SIN tunnel junctions microfabricated with a full wafer process

J. P. Castle, M. F. Cunningham, B. Neuhauser, S. Golwala, F. P. Lipschultz, A. Barootkoob, O. B. Drury, Matthias Frank, J. Jochum, S. E. Labov, C. A. Meats, B. Sadoulet, A. Slepoy, D. A. Yale

Research output: Contribution to journal › Article

1 Scopus citations

Abstract

We have developed a "full wafer" process for producing AI/A1₂0₃/Cu superconductor-insulator-normal (SIN) tunnel junctions for use as X-ray and phonon sensors. We describe microfabrication details and present I-V data.

Original language	English (US)
Pages (from-to)	2897-2898
Number of pages	2
Journal	Czechoslovak Journal of Physics
Volume	46
Issue number	SUPPL. 5
DOIs	https://doi.org/10.1007/BF02570435
State	Published - Dec 1 1996
Externally published	Yes

ASJC Scopus subject areas

Physics and Astronomy(all)

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10.1007/BF02570435

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Castle, J. P., Cunningham, M. F., Neuhauser, B., Golwala, S., Lipschultz, F. P., Barootkoob, A., Drury, O. B., Frank, M., Jochum, J., Labov, S. E., Meats, C. A., Sadoulet, B., Slepoy, A., & Yale, D. A. (1996). Preparation and characterization of Al/Al₂O₃/Cu SIN tunnel junctions microfabricated with a full wafer process. Czechoslovak Journal of Physics, 46(SUPPL. 5), 2897-2898. https://doi.org/10.1007/BF02570435

Preparation and characterization of Al/Al₂O₃/Cu SIN tunnel junctions microfabricated with a full wafer process. / Castle, J. P.; Cunningham, M. F.; Neuhauser, B.; Golwala, S.; Lipschultz, F. P.; Barootkoob, A.; Drury, O. B.; Frank, Matthias; Jochum, J.; Labov, S. E.; Meats, C. A.; Sadoulet, B.; Slepoy, A.; Yale, D. A.

In: Czechoslovak Journal of Physics, Vol. 46, No. SUPPL. 5, 01.12.1996, p. 2897-2898.

Research output: Contribution to journal › Article

Castle, JP, Cunningham, MF, Neuhauser, B, Golwala, S, Lipschultz, FP, Barootkoob, A, Drury, OB, Frank, M, Jochum, J, Labov, SE, Meats, CA, Sadoulet, B, Slepoy, A & Yale, DA 1996, 'Preparation and characterization of Al/Al₂O₃/Cu SIN tunnel junctions microfabricated with a full wafer process', Czechoslovak Journal of Physics, vol. 46, no. SUPPL. 5, pp. 2897-2898. https://doi.org/10.1007/BF02570435

Castle, J. P. ; Cunningham, M. F. ; Neuhauser, B. ; Golwala, S. ; Lipschultz, F. P. ; Barootkoob, A. ; Drury, O. B. ; Frank, Matthias ; Jochum, J. ; Labov, S. E. ; Meats, C. A. ; Sadoulet, B. ; Slepoy, A. ; Yale, D. A. / Preparation and characterization of Al/Al₂O₃/Cu SIN tunnel junctions microfabricated with a full wafer process. In: Czechoslovak Journal of Physics. 1996 ; Vol. 46, No. SUPPL. 5. pp. 2897-2898.

@article{28584fe9f5d34c5fb0dc4a361cb0a7f9,

title = "Preparation and characterization of Al/Al2O3/Cu SIN tunnel junctions microfabricated with a full wafer process",

abstract = "We have developed a {"}full wafer{"} process for producing AI/A1203/Cu superconductor-insulator-normal (SIN) tunnel junctions for use as X-ray and phonon sensors. We describe microfabrication details and present I-V data.",

author = "Castle, {J. P.} and Cunningham, {M. F.} and B. Neuhauser and S. Golwala and Lipschultz, {F. P.} and A. Barootkoob and Drury, {O. B.} and Matthias Frank and J. Jochum and Labov, {S. E.} and Meats, {C. A.} and B. Sadoulet and A. Slepoy and Yale, {D. A.}",

year = "1996",

month = dec,

day = "1",

doi = "10.1007/BF02570435",

language = "English (US)",

volume = "46",

pages = "2897--2898",

journal = "Czechoslovak Journal of Physics",

issn = "0011-4626",

publisher = "Springer Netherlands",

number = "SUPPL. 5",

}

TY - JOUR

T1 - Preparation and characterization of Al/Al2O3/Cu SIN tunnel junctions microfabricated with a full wafer process

AU - Castle, J. P.

AU - Cunningham, M. F.

AU - Neuhauser, B.

AU - Golwala, S.

AU - Lipschultz, F. P.

AU - Barootkoob, A.

AU - Drury, O. B.

AU - Frank, Matthias

AU - Jochum, J.

AU - Labov, S. E.

AU - Meats, C. A.

AU - Sadoulet, B.

AU - Slepoy, A.

AU - Yale, D. A.

PY - 1996/12/1

Y1 - 1996/12/1

N2 - We have developed a "full wafer" process for producing AI/A1203/Cu superconductor-insulator-normal (SIN) tunnel junctions for use as X-ray and phonon sensors. We describe microfabrication details and present I-V data.

AB - We have developed a "full wafer" process for producing AI/A1203/Cu superconductor-insulator-normal (SIN) tunnel junctions for use as X-ray and phonon sensors. We describe microfabrication details and present I-V data.

UR - http://www.scopus.com/inward/record.url?scp=33748973292&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=33748973292&partnerID=8YFLogxK

U2 - 10.1007/BF02570435

DO - 10.1007/BF02570435

M3 - Article

AN - SCOPUS:33748973292

VL - 46

SP - 2897

EP - 2898

JO - Czechoslovak Journal of Physics

JF - Czechoslovak Journal of Physics

SN - 0011-4626

IS - SUPPL. 5

ER -