Photopatternable superhydrophobic nanocomposites for microfabrication

Lingfei Hong, Tingrui Pan

Research output: Contribution to journalArticle

40 Scopus citations

Abstract

In this paper, we first report on direct-photolithography-based microfabrication of transparent superhydrophobic micropatterns using novel photodefinable nanocomposites, combining the nanomorphology and hydrophobicity of polytetrafluoroethylene (PTFE) nanoparticles and the photopatternability and transparency of an SU-8 photoresist using both direct-mixing and coating-immobilization methods. The direct mixture of PTFESU-8 nanocomposite can be reliably spin-coated and photopatterned onto transparent substrates (e.g., glass or polymers) with a minimal feature resolution of 50 μ\hbox{m}. The resulting nanocomposite film possesses a contact angle of water at 150, although its optical transparency is less than 30%. Furthermore, a modified coating-immobilization approach, employing spray coating and thermal immobilization of PTFE nanoparticles onto an SU-8 polymer matrix, significantly enhances superhydrophobicity, lithography resolution, as well as optical transparency. The highest optical transparency of 80% and a minimal feature resolution of 10 μhbox{m} have been achieved using the standard photolithography approach, while the contact angle of water above 165 enables extraordinary superhydrophobicity with low hysteresis. The novel PTFESU-8 nanocomposites provide a unique combination of superhydrophobicity, optical transparency, and photopatternability, along with excellent adaptability and simple processability, which offer great extension to rapidly evolving micronanoengineering applications.

Original languageEnglish (US)
Article number5430872
Pages (from-to)246-253
Number of pages8
JournalJournal of Microelectromechanical Systems
Volume19
Issue number2
DOIs
StatePublished - Apr 1 2010

Keywords

  • Microfabrication
  • Nanocomposite
  • Nanoparticle
  • Photolithography
  • Polytetrafluoroethylene (PTFE)
  • SU-8
  • Superhydrophobicity

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Mechanical Engineering

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