Abstract
In this paper, we first report on direct-photolithography-based microfabrication of transparent superhydrophobic micropatterns using novel photodefinable nanocomposites, combining the nanomorphology and hydrophobicity of polytetrafluoroethylene (PTFE) nanoparticles and the photopatternability and transparency of an SU-8 photoresist using both direct-mixing and coating-immobilization methods. The direct mixture of PTFESU-8 nanocomposite can be reliably spin-coated and photopatterned onto transparent substrates (e.g., glass or polymers) with a minimal feature resolution of 50 μ\hbox{m}. The resulting nanocomposite film possesses a contact angle of water at 150, although its optical transparency is less than 30%. Furthermore, a modified coating-immobilization approach, employing spray coating and thermal immobilization of PTFE nanoparticles onto an SU-8 polymer matrix, significantly enhances superhydrophobicity, lithography resolution, as well as optical transparency. The highest optical transparency of 80% and a minimal feature resolution of 10 μhbox{m} have been achieved using the standard photolithography approach, while the contact angle of water above 165 enables extraordinary superhydrophobicity with low hysteresis. The novel PTFESU-8 nanocomposites provide a unique combination of superhydrophobicity, optical transparency, and photopatternability, along with excellent adaptability and simple processability, which offer great extension to rapidly evolving micronanoengineering applications.
| Original language | English (US) |
|---|---|
| Article number | 5430872 |
| Pages (from-to) | 246-253 |
| Number of pages | 8 |
| Journal | Journal of Microelectromechanical Systems |
| Volume | 19 |
| Issue number | 2 |
| DOIs | |
| State | Published - Apr 1 2010 |
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Keywords
- Microfabrication
- Nanocomposite
- Nanoparticle
- Photolithography
- Polytetrafluoroethylene (PTFE)
- SU-8
- Superhydrophobicity
ASJC Scopus subject areas
- Electrical and Electronic Engineering
- Mechanical Engineering
Cite this
Photopatternable superhydrophobic nanocomposites for microfabrication. / Hong, Lingfei; Pan, Tingrui.
In: Journal of Microelectromechanical Systems, Vol. 19, No. 2, 5430872, 01.04.2010, p. 246-253.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Photopatternable superhydrophobic nanocomposites for microfabrication
AU - Hong, Lingfei
AU - Pan, Tingrui
PY - 2010/4/1
Y1 - 2010/4/1
N2 - In this paper, we first report on direct-photolithography-based microfabrication of transparent superhydrophobic micropatterns using novel photodefinable nanocomposites, combining the nanomorphology and hydrophobicity of polytetrafluoroethylene (PTFE) nanoparticles and the photopatternability and transparency of an SU-8 photoresist using both direct-mixing and coating-immobilization methods. The direct mixture of PTFESU-8 nanocomposite can be reliably spin-coated and photopatterned onto transparent substrates (e.g., glass or polymers) with a minimal feature resolution of 50 μ\hbox{m}. The resulting nanocomposite film possesses a contact angle of water at 150, although its optical transparency is less than 30%. Furthermore, a modified coating-immobilization approach, employing spray coating and thermal immobilization of PTFE nanoparticles onto an SU-8 polymer matrix, significantly enhances superhydrophobicity, lithography resolution, as well as optical transparency. The highest optical transparency of 80% and a minimal feature resolution of 10 μhbox{m} have been achieved using the standard photolithography approach, while the contact angle of water above 165 enables extraordinary superhydrophobicity with low hysteresis. The novel PTFESU-8 nanocomposites provide a unique combination of superhydrophobicity, optical transparency, and photopatternability, along with excellent adaptability and simple processability, which offer great extension to rapidly evolving micronanoengineering applications.
AB - In this paper, we first report on direct-photolithography-based microfabrication of transparent superhydrophobic micropatterns using novel photodefinable nanocomposites, combining the nanomorphology and hydrophobicity of polytetrafluoroethylene (PTFE) nanoparticles and the photopatternability and transparency of an SU-8 photoresist using both direct-mixing and coating-immobilization methods. The direct mixture of PTFESU-8 nanocomposite can be reliably spin-coated and photopatterned onto transparent substrates (e.g., glass or polymers) with a minimal feature resolution of 50 μ\hbox{m}. The resulting nanocomposite film possesses a contact angle of water at 150, although its optical transparency is less than 30%. Furthermore, a modified coating-immobilization approach, employing spray coating and thermal immobilization of PTFE nanoparticles onto an SU-8 polymer matrix, significantly enhances superhydrophobicity, lithography resolution, as well as optical transparency. The highest optical transparency of 80% and a minimal feature resolution of 10 μhbox{m} have been achieved using the standard photolithography approach, while the contact angle of water above 165 enables extraordinary superhydrophobicity with low hysteresis. The novel PTFESU-8 nanocomposites provide a unique combination of superhydrophobicity, optical transparency, and photopatternability, along with excellent adaptability and simple processability, which offer great extension to rapidly evolving micronanoengineering applications.
KW - Microfabrication
KW - Nanocomposite
KW - Nanoparticle
KW - Photolithography
KW - Polytetrafluoroethylene (PTFE)
KW - SU-8
KW - Superhydrophobicity
UR - http://www.scopus.com/inward/record.url?scp=77950581049&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=77950581049&partnerID=8YFLogxK
U2 - 10.1109/JMEMS.2010.2041189
DO - 10.1109/JMEMS.2010.2041189
M3 - Article
VL - 19
SP - 246
EP - 253
JO - Journal of Microelectromechanical Systems
JF - Journal of Microelectromechanical Systems
SN - 1057-7157
IS - 2
M1 - 5430872
ER -