Photopatternable conductive PDMS as a new mems material

H. Cong, Tingrui Pan

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Scopus citations

Abstract

Polydimethylsiloxane (PDMS) elastomer has been widely used in various biological and medical applications. However, high electrical impedance and poor adhesion to metal limit its further applications in the area of electrical sensing and flexible circuits. In this paper, we first developed conductive photodefineable PDMS composites addressing both electrical conductivity and photopatternability. The photosensitive composite, consisting of a photosensitive reagent, a conductive filler and PDMS pre-polymer, can be used as a regular photoresist. A standard photolithographic approach has been used to fabricate the conductive elastomer microstructures. Highest conductivity of 0.01 Ω·cm and minimal resolution of 10 µm have been achieved using the conductive PDMS composite.

Original languageEnglish (US)
Title of host publication2008 Solid-State Sensors, Actuators, and Microsystems Workshop
EditorsLeland Spangler, Kimberly L. Turner
PublisherTransducer Research Foundation
Pages228-231
Number of pages4
ISBN (Electronic)9780964002494
StatePublished - Jan 1 2008
Event2008 Solid-State Sensors, Actuators, and Microsystems Workshop - Hilton Head Island, United States
Duration: Jun 1 2008Jun 5 2008

Publication series

NameTechnical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop

Conference

Conference2008 Solid-State Sensors, Actuators, and Microsystems Workshop
CountryUnited States
CityHilton Head Island
Period6/1/086/5/08

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering
  • Hardware and Architecture

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  • Cite this

    Cong, H., & Pan, T. (2008). Photopatternable conductive PDMS as a new mems material. In L. Spangler, & K. L. Turner (Eds.), 2008 Solid-State Sensors, Actuators, and Microsystems Workshop (pp. 228-231). (Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop). Transducer Research Foundation.