Abstract
A photolithography-free laser-patterned hydrofluoric acid-resistant chromium-polyimide tape masking method for rapid prototyping of microfluidic systems in glass is presented. The patterns are defined with a diode-pumped solid-state laser. Minimum feature size is limited to 30 µm; minimum spacing between features is limited to 40 µm. The patterned glass substrates are etched in 49% hydrofluoric acid at ambient temperature with soft agitation (up to 18 min). This method demonstrates comparable results to current more sophisticated masking methods in terms of the etched depth (up to 95 µm in borosilicate glass), feature undercut in isotropic etch (about 1.47), mask hole density (negligible, practically zero) as well as high yield and reliability.
| Original language | English (US) |
|---|---|
| Title of host publication | 2016 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2016 |
| Editors | Mark G. Allen, Tina Lamers |
| Publisher | Transducer Research Foundation |
| Pages | 172-175 |
| Number of pages | 4 |
| ISBN (Electronic) | 9781940470023 |
| DOIs | |
| State | Published - Jan 1 2016 |
| Event | 2016 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2016 - Hilton Head, United States Duration: Jun 5 2016 → Jun 9 2016 |
Publication series
| Name | 2016 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2016 |
|---|
Conference
| Conference | 2016 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2016 |
|---|---|
| Country | United States |
| City | Hilton Head |
| Period | 6/5/16 → 6/9/16 |
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ASJC Scopus subject areas
- Hardware and Architecture
- Electrical and Electronic Engineering
Cite this
Photolithography-free laser-patterned Hf acid-resistant chromium-polyimide mask for rapid fabrication of microfluidic systems in glass. / Zamuruyev, Konstantin O.; Zrodnikov, Yuriy; Davis, Cristina E.
2016 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2016. ed. / Mark G. Allen; Tina Lamers. Transducer Research Foundation, 2016. p. 172-175 (2016 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2016).Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - Photolithography-free laser-patterned Hf acid-resistant chromium-polyimide mask for rapid fabrication of microfluidic systems in glass
AU - Zamuruyev, Konstantin O.
AU - Zrodnikov, Yuriy
AU - Davis, Cristina E
PY - 2016/1/1
Y1 - 2016/1/1
N2 - A photolithography-free laser-patterned hydrofluoric acid-resistant chromium-polyimide tape masking method for rapid prototyping of microfluidic systems in glass is presented. The patterns are defined with a diode-pumped solid-state laser. Minimum feature size is limited to 30 µm; minimum spacing between features is limited to 40 µm. The patterned glass substrates are etched in 49% hydrofluoric acid at ambient temperature with soft agitation (up to 18 min). This method demonstrates comparable results to current more sophisticated masking methods in terms of the etched depth (up to 95 µm in borosilicate glass), feature undercut in isotropic etch (about 1.47), mask hole density (negligible, practically zero) as well as high yield and reliability.
AB - A photolithography-free laser-patterned hydrofluoric acid-resistant chromium-polyimide tape masking method for rapid prototyping of microfluidic systems in glass is presented. The patterns are defined with a diode-pumped solid-state laser. Minimum feature size is limited to 30 µm; minimum spacing between features is limited to 40 µm. The patterned glass substrates are etched in 49% hydrofluoric acid at ambient temperature with soft agitation (up to 18 min). This method demonstrates comparable results to current more sophisticated masking methods in terms of the etched depth (up to 95 µm in borosilicate glass), feature undercut in isotropic etch (about 1.47), mask hole density (negligible, practically zero) as well as high yield and reliability.
UR - http://www.scopus.com/inward/record.url?scp=85071489142&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85071489142&partnerID=8YFLogxK
U2 - 10.31438/trf.hh2016.48
DO - 10.31438/trf.hh2016.48
M3 - Conference contribution
AN - SCOPUS:85071489142
T3 - 2016 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2016
SP - 172
EP - 175
BT - 2016 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2016
A2 - Allen, Mark G.
A2 - Lamers, Tina
PB - Transducer Research Foundation
ER -