Photochemical template removal and spatial patterning of zeolite MFI thin films using UV/ozone treatment

Qinghua Li, Meri L. Amweg, Chanel K. Yee, Alexandra Navrotsky, Atul N. Parikh

Research output: Contribution to journalArticle

26 Citations (Scopus)

Abstract

This paper describes an application of a non-thermal, photochemical calcination process for an efficient and spatially controlled removal of the organic structure-directing agent in the preparation of thin films of microporous or zeolite materials. We prepared thin-films of a high silica zeolite (structure code: MFI) following a previously published procedure. The films were illuminated using an ozone generating short-wavelength ultraviolet light in ambient environments and characterized using Fourier-transform infrared spectroscopy, imaging ellipsometry, thin-film X-ray diffraction, and scanning electron microscopy. Results presented here indicate that the UV/ozone treatment under nominally room temperature conditions leads to complete removal of template (structure-directing-agent) from zeolite films comparable to that achieved by thermal calcination. Furthermore, spatially addressing the UV/ozone illumination pattern using a physical mask resulted in the lateral confinement of the template removal from the zeolite film leaving behind a composite film composed of templated and template-free regions. Subsequent chemical treatment of the patterned film selectively removed the as-synthesized, unexposed, regions of the film thereby providing a means for the creation of isolated zeolite film islands at predetermined locations on the substrate surface.

Original languageEnglish (US)
Pages (from-to)45-51
Number of pages7
JournalMicroporous and Mesoporous Materials
Volume87
Issue number1
DOIs
StatePublished - Dec 29 2005

Fingerprint

Zeolites
Ozone
ozone
templates
Thin films
thin films
Calcination
roasting
Ellipsometry
Composite films
Silicon Dioxide
Fourier transform infrared spectroscopy
Masks
ultraviolet radiation
ellipsometry
Lighting
Silica
masks
Imaging techniques
illumination

Keywords

  • Calcination
  • Ellipsometric imaging
  • Microporous thin films
  • Patterning
  • UV/ozone

ASJC Scopus subject areas

  • Catalysis
  • Materials Science(all)

Cite this

Photochemical template removal and spatial patterning of zeolite MFI thin films using UV/ozone treatment. / Li, Qinghua; Amweg, Meri L.; Yee, Chanel K.; Navrotsky, Alexandra; Parikh, Atul N.

In: Microporous and Mesoporous Materials, Vol. 87, No. 1, 29.12.2005, p. 45-51.

Research output: Contribution to journalArticle

Li, Qinghua ; Amweg, Meri L. ; Yee, Chanel K. ; Navrotsky, Alexandra ; Parikh, Atul N. / Photochemical template removal and spatial patterning of zeolite MFI thin films using UV/ozone treatment. In: Microporous and Mesoporous Materials. 2005 ; Vol. 87, No. 1. pp. 45-51.
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