Abstract
This paper describes the design, fabrication, packaging and testing of a microlens integrated in a multi-layered MEMS microspectrometer. The microlens was fabricated using modified PDMS molding to form a suspended lens diaphragm. Gaussian beam propagation model was used to measure the focal length and quantify M2 value of the microlens. A tunable calibration source was set up to measure the response of the packaged device. Dual wavelength separation by the packaged device was demonstrated by CCD imaging and beam profiling of the spectroscopic output. We demonstrated specific techniques to measure critical parameters of microoptics systems for future optimization of spectroscopic devices.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 859-868 |
| Number of pages | 10 |
| Journal | Sensors |
| Volume | 9 |
| Issue number | 2 |
| DOIs | |
| State | Published - Feb 2009 |
Keywords
- Gaussian propagation
- MEMS
- Microlens
- Microoptics
- Spectroscopy
ASJC Scopus subject areas
- Electrical and Electronic Engineering
- Atomic and Molecular Physics, and Optics
- Analytical Chemistry
- Biochemistry
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Cite this
Lo, J., Chen, S. J., Fang, Q., Papaioannou, T., Kim, E. S., Gundersen, M., & Marcu, L. (2009). Performance of a diaphragmed microlens for a packaged microspectrometer. Sensors, 9(2), 859-868. https://doi.org/10.3390/s90200859