Abstract
This paper describes the design, fabrication, packaging and testing of a microlens integrated in a multi-layered MEMS microspectrometer. The microlens was fabricated using modified PDMS molding to form a suspended lens diaphragm. Gaussian beam propagation model was used to measure the focal length and quantify M2 value of the microlens. A tunable calibration source was set up to measure the response of the packaged device. Dual wavelength separation by the packaged device was demonstrated by CCD imaging and beam profiling of the spectroscopic output. We demonstrated specific techniques to measure critical parameters of microoptics systems for future optimization of spectroscopic devices.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 859-868 |
| Number of pages | 10 |
| Journal | Sensors |
| Volume | 9 |
| Issue number | 2 |
| DOIs | |
| State | Published - Feb 2009 |
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Keywords
- Gaussian propagation
- MEMS
- Microlens
- Microoptics
- Spectroscopy
ASJC Scopus subject areas
- Electrical and Electronic Engineering
- Atomic and Molecular Physics, and Optics
- Analytical Chemistry
- Biochemistry
Cite this
Performance of a diaphragmed microlens for a packaged microspectrometer. / Lo, Joe; Chen, Shih Jui; Fang, Qiyin; Papaioannou, Thanassis; Kim, Eun Sok; Gundersen, Martin; Marcu, Laura.
In: Sensors, Vol. 9, No. 2, 02.2009, p. 859-868.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Performance of a diaphragmed microlens for a packaged microspectrometer
AU - Lo, Joe
AU - Chen, Shih Jui
AU - Fang, Qiyin
AU - Papaioannou, Thanassis
AU - Kim, Eun Sok
AU - Gundersen, Martin
AU - Marcu, Laura
PY - 2009/2
Y1 - 2009/2
N2 - This paper describes the design, fabrication, packaging and testing of a microlens integrated in a multi-layered MEMS microspectrometer. The microlens was fabricated using modified PDMS molding to form a suspended lens diaphragm. Gaussian beam propagation model was used to measure the focal length and quantify M2 value of the microlens. A tunable calibration source was set up to measure the response of the packaged device. Dual wavelength separation by the packaged device was demonstrated by CCD imaging and beam profiling of the spectroscopic output. We demonstrated specific techniques to measure critical parameters of microoptics systems for future optimization of spectroscopic devices.
AB - This paper describes the design, fabrication, packaging and testing of a microlens integrated in a multi-layered MEMS microspectrometer. The microlens was fabricated using modified PDMS molding to form a suspended lens diaphragm. Gaussian beam propagation model was used to measure the focal length and quantify M2 value of the microlens. A tunable calibration source was set up to measure the response of the packaged device. Dual wavelength separation by the packaged device was demonstrated by CCD imaging and beam profiling of the spectroscopic output. We demonstrated specific techniques to measure critical parameters of microoptics systems for future optimization of spectroscopic devices.
KW - Gaussian propagation
KW - MEMS
KW - Microlens
KW - Microoptics
KW - Spectroscopy
UR - http://www.scopus.com/inward/record.url?scp=63849186309&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=63849186309&partnerID=8YFLogxK
U2 - 10.3390/s90200859
DO - 10.3390/s90200859
M3 - Article
C2 - 22399943
AN - SCOPUS:63849186309
VL - 9
SP - 859
EP - 868
JO - Sensors (Switzerland)
JF - Sensors (Switzerland)
SN - 1424-8220
IS - 2
ER -