Performance of a diaphragmed microlens for a packaged microspectrometer

Joe Lo, Shih Jui Chen, Qiyin Fang, Thanassis Papaioannou, Eun Sok Kim, Martin Gundersen, Laura Marcu

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

This paper describes the design, fabrication, packaging and testing of a microlens integrated in a multi-layered MEMS microspectrometer. The microlens was fabricated using modified PDMS molding to form a suspended lens diaphragm. Gaussian beam propagation model was used to measure the focal length and quantify M2 value of the microlens. A tunable calibration source was set up to measure the response of the packaged device. Dual wavelength separation by the packaged device was demonstrated by CCD imaging and beam profiling of the spectroscopic output. We demonstrated specific techniques to measure critical parameters of microoptics systems for future optimization of spectroscopic devices.

Original languageEnglish (US)
Pages (from-to)859-868
Number of pages10
JournalSensors
Volume9
Issue number2
DOIs
StatePublished - Feb 2009

Fingerprint

Microoptics
Gaussian beams
Diaphragms
Charge coupled devices
Molding
MEMS
Lenses
Packaging
Calibration
Imaging techniques
Fabrication
Equipment and Supplies
Wavelength
Testing
Micro-Electrical-Mechanical Systems
Product Packaging
diaphragms
Diaphragm
packaging
microelectromechanical systems

Keywords

  • Gaussian propagation
  • MEMS
  • Microlens
  • Microoptics
  • Spectroscopy

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Atomic and Molecular Physics, and Optics
  • Analytical Chemistry
  • Biochemistry

Cite this

Lo, J., Chen, S. J., Fang, Q., Papaioannou, T., Kim, E. S., Gundersen, M., & Marcu, L. (2009). Performance of a diaphragmed microlens for a packaged microspectrometer. Sensors, 9(2), 859-868. https://doi.org/10.3390/s90200859

Performance of a diaphragmed microlens for a packaged microspectrometer. / Lo, Joe; Chen, Shih Jui; Fang, Qiyin; Papaioannou, Thanassis; Kim, Eun Sok; Gundersen, Martin; Marcu, Laura.

In: Sensors, Vol. 9, No. 2, 02.2009, p. 859-868.

Research output: Contribution to journalArticle

Lo, J, Chen, SJ, Fang, Q, Papaioannou, T, Kim, ES, Gundersen, M & Marcu, L 2009, 'Performance of a diaphragmed microlens for a packaged microspectrometer', Sensors, vol. 9, no. 2, pp. 859-868. https://doi.org/10.3390/s90200859
Lo J, Chen SJ, Fang Q, Papaioannou T, Kim ES, Gundersen M et al. Performance of a diaphragmed microlens for a packaged microspectrometer. Sensors. 2009 Feb;9(2):859-868. https://doi.org/10.3390/s90200859
Lo, Joe ; Chen, Shih Jui ; Fang, Qiyin ; Papaioannou, Thanassis ; Kim, Eun Sok ; Gundersen, Martin ; Marcu, Laura. / Performance of a diaphragmed microlens for a packaged microspectrometer. In: Sensors. 2009 ; Vol. 9, No. 2. pp. 859-868.
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