Performance of a diaphragmed microlens for a packaged microspectrometer

Joe Lo, Shih Jui Chen, Qiyin Fang, Thanassis Papaioannou, Eun Sok Kim, Martin Gundersen, Laura Marcu

Research output: Contribution to journalArticle

2 Scopus citations

Abstract

This paper describes the design, fabrication, packaging and testing of a microlens integrated in a multi-layered MEMS microspectrometer. The microlens was fabricated using modified PDMS molding to form a suspended lens diaphragm. Gaussian beam propagation model was used to measure the focal length and quantify M2 value of the microlens. A tunable calibration source was set up to measure the response of the packaged device. Dual wavelength separation by the packaged device was demonstrated by CCD imaging and beam profiling of the spectroscopic output. We demonstrated specific techniques to measure critical parameters of microoptics systems for future optimization of spectroscopic devices.

Original languageEnglish (US)
Pages (from-to)859-868
Number of pages10
JournalSensors
Volume9
Issue number2
DOIs
StatePublished - Feb 2009

Keywords

  • Gaussian propagation
  • MEMS
  • Microlens
  • Microoptics
  • Spectroscopy

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Atomic and Molecular Physics, and Optics
  • Analytical Chemistry
  • Biochemistry

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    Lo, J., Chen, S. J., Fang, Q., Papaioannou, T., Kim, E. S., Gundersen, M., & Marcu, L. (2009). Performance of a diaphragmed microlens for a packaged microspectrometer. Sensors, 9(2), 859-868. https://doi.org/10.3390/s90200859