Performance of a diaphragmed microlens for a packaged microspectrometer

Joe Lo; Shih Jui Chen; Qiyin Fang; Thanassis Papaioannou; Eun Sok Kim; Martin Gundersen; Laura Marcu

doi:10.3390/s90200859

Performance of a diaphragmed microlens for a packaged microspectrometer

Joe Lo, Shih Jui Chen, Qiyin Fang, Thanassis Papaioannou, Eun Sok Kim, Martin Gundersen, Laura Marcu

Neurological Surgery

Research output: Contribution to journal › Article › peer-review

2 Scopus citations

Abstract

This paper describes the design, fabrication, packaging and testing of a microlens integrated in a multi-layered MEMS microspectrometer. The microlens was fabricated using modified PDMS molding to form a suspended lens diaphragm. Gaussian beam propagation model was used to measure the focal length and quantify M² value of the microlens. A tunable calibration source was set up to measure the response of the packaged device. Dual wavelength separation by the packaged device was demonstrated by CCD imaging and beam profiling of the spectroscopic output. We demonstrated specific techniques to measure critical parameters of microoptics systems for future optimization of spectroscopic devices.

Original language	English (US)
Pages (from-to)	859-868
Number of pages	10
Journal	Sensors
Volume	9
Issue number	2
DOIs	https://doi.org/10.3390/s90200859
State	Published - Feb 2009

Keywords

Gaussian propagation
MEMS
Microlens
Microoptics
Spectroscopy

ASJC Scopus subject areas

Electrical and Electronic Engineering
Atomic and Molecular Physics, and Optics
Analytical Chemistry
Biochemistry

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abstract = "This paper describes the design, fabrication, packaging and testing of a microlens integrated in a multi-layered MEMS microspectrometer. The microlens was fabricated using modified PDMS molding to form a suspended lens diaphragm. Gaussian beam propagation model was used to measure the focal length and quantify M2 value of the microlens. A tunable calibration source was set up to measure the response of the packaged device. Dual wavelength separation by the packaged device was demonstrated by CCD imaging and beam profiling of the spectroscopic output. We demonstrated specific techniques to measure critical parameters of microoptics systems for future optimization of spectroscopic devices.",

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AU - Lo, Joe

AU - Chen, Shih Jui

AU - Fang, Qiyin

AU - Papaioannou, Thanassis

AU - Kim, Eun Sok

AU - Gundersen, Martin

AU - Marcu, Laura

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AB - This paper describes the design, fabrication, packaging and testing of a microlens integrated in a multi-layered MEMS microspectrometer. The microlens was fabricated using modified PDMS molding to form a suspended lens diaphragm. Gaussian beam propagation model was used to measure the focal length and quantify M2 value of the microlens. A tunable calibration source was set up to measure the response of the packaged device. Dual wavelength separation by the packaged device was demonstrated by CCD imaging and beam profiling of the spectroscopic output. We demonstrated specific techniques to measure critical parameters of microoptics systems for future optimization of spectroscopic devices.

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KW - MEMS

KW - Microlens

KW - Microoptics

KW - Spectroscopy

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Performance of a diaphragmed microlens for a packaged microspectrometer

Abstract

Keywords

ASJC Scopus subject areas

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