Packaging and characteristics of a micro fluorescence spectroscopy analyzer

J. Lo, Q. Fang, W. Pang, T. Papaionnou, Q. Shui, E. S. Kim, M. A. Gundersen, Laura Marcu

Research output: Chapter in Book/Report/Conference proceedingConference contribution


The overall objective this work is the development of a miniaturized fluorescence spectroscopy analyzer realized via microfabrication technology. Previously, we reported a MEMS micro grating actuated by a piezoelectric cantilever. For such device to be used in a spectroscopic system, optical characterization of the grating's efficiency and the system's stray light are required. We report here the characterization of the grating cantilever with a MEMS micro lens with the intention of fitting into a packaged micro spectroscopic system. This packaging is accomplished by multi-wafer (silicon) bonding of strategically aligned crystalline planes in order to form the basic geometry of a miniaturized spectroscopy setup. One of these crystalline planes, 〈111〉 of silicon, is used as a mirror for folding and compacting the optics at the specific angle of 54.74° (with wafer plane normal). The packaging, microlens, and grating cantilever are position in the designed geometry to accept a self-aligned fiber input from a flash lamp source. The microlens component is presented with beam profilometry of its focusing at a focal length of 7.7 mm. The diffraction is interrogated by a monochromator for quantifying the above said characteristics. The relative efficiency of the grating was 40-70% in the 400-600 nm range. Together these characterized components define the geometry and performance of our micro fluorescence spectroscopy system.

Original languageEnglish (US)
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
StatePublished - 2006
EventAdvanced Biomedical and Clinical Diagnostic Systems IV - San Jose, CA, United States
Duration: Jan 22 2006Jan 24 2006


OtherAdvanced Biomedical and Clinical Diagnostic Systems IV
Country/TerritoryUnited States
CitySan Jose, CA


  • Efficiency
  • Grating
  • MEMS, cantilever
  • Micro lens
  • Packaging
  • Spectroscopy
  • Stray light

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics


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