Optimization of x-ray sources for proximity lithography produced by a high average power Nd: glass laser

P. Celliers, L. B. Da Silva, C. B. Dane, S. Mrowka, M. Norton, J. Harder, L. Hackel, Dennis L Matthews, H. Fiedorowicz, A. Bartnik, J. R. Maldonado, J. A. Abate

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Physics & Astronomy