Optical characterization of a bimorph deformable mirror

David A. Horsley, Hyunkyu Park, Chih Wei Chuang, Sophie P. Laut, John S Werner

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Scopus citations

Abstract

This paper reports the results of interferometric characterization of a bimorph deformable mirror (DM) designed for use in an adaptive optics (AO) system. The natural frequencies of this DM were measured up to 20 kHz using both a custom stroboscopic phase-shifting interferometer as well as a commercial Laser Doppler Vibrometer (LDV). Interferometric measurements of the DM surface profile were analyzed by fitting the surface with mode-shapes predicted using classical plate theory for an elastically-supported disk. The measured natural frequencies were found to be in good agreement with the predictions of the theoretical model.

Original languageEnglish (US)
Title of host publicationAmerican Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS
Pages101-105
Number of pages5
Volume7 MEMS
DOIs
Publication statusPublished - 2005
Event2005 ASME International Mecahnical Engineering Congress and Exposition, IMECE 2005 - Orlando, FL, United States
Duration: Nov 5 2005Nov 11 2005

Other

Other2005 ASME International Mecahnical Engineering Congress and Exposition, IMECE 2005
CountryUnited States
CityOrlando, FL
Period11/5/0511/11/05

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ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering
  • Control and Systems Engineering

Cite this

Horsley, D. A., Park, H., Chuang, C. W., Laut, S. P., & Werner, J. S. (2005). Optical characterization of a bimorph deformable mirror. In American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS (Vol. 7 MEMS, pp. 101-105) https://doi.org/10.1115/IMECE2005-81836