Oblique-incidence optical reflectivity difference from a rough film of crystalline material

X. D. Zhu

Research output: Contribution to journalArticle

30 Citations (Scopus)

Abstract

Formation of a rough film of crystalline material on a smooth substrate resulting from kinetic roughening in epitaxy or erosion causes disproportionate changes in reflectivity for s- and p-polarized light. I present a mean-field theory of optical reflectivity difference defined as (rp-r p0)/rp0-(rs-rs0)/r s0≡Δps from such a rough film, with rp0 and rs0 being the reflectivities of the bare substrate, and rp and rs being the reflectivities after the rough film forms on the substrate. In the limit that the average film thickness is less than the optical wavelength λ, I found that Δp - Δs consists of a term that varies linearly with the average film thickness and a term that is proportional to the surface density of step edge atoms. I apply such a theory to the analysis of growth and ion erosion of a number of crystalline materials studied with the oblique-incidence optical reflectivity difference (OI-RD) technique.

Original languageEnglish (US)
Article number115407
Pages (from-to)1154071-1154075
Number of pages5
JournalPhysical Review B - Condensed Matter and Materials Physics
Volume69
Issue number11
StatePublished - Mar 2004

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incidence
Crystalline materials
reflectance
erosion
Film thickness
Erosion
film thickness
Substrates
Mean field theory
Light polarization
Epitaxial growth
epitaxy
polarized light
sands
Sand
Ions
Wavelength
Atoms
Kinetics
causes

ASJC Scopus subject areas

  • Condensed Matter Physics

Cite this

Oblique-incidence optical reflectivity difference from a rough film of crystalline material. / Zhu, X. D.

In: Physical Review B - Condensed Matter and Materials Physics, Vol. 69, No. 11, 115407, 03.2004, p. 1154071-1154075.

Research output: Contribution to journalArticle

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