Nanometer-scale fabrication by simultaneous nanoshaving and molecular self-assembly

Song Xu, Gang-yu Liu

Research output: Contribution to journalArticlepeer-review

361 Scopus citations


Nanostructures down to a few nanometers in size and composed of close-packed and well-ordered molecules have been fabricated by simultaneous nanoshaving using an atomic force microscopy (AFM) tip and alkanethiols' self-assembly on gold. Compared with other microfabrication methods, this procedure allows more precise control in terms of the size and geometry of the fabricated features. An edge resolution better than 2 nm can be routinely obtained. In addition, the fabricated nanostructures can be quickly changed, modified, and characterized in situ. These advantages should make this method very useful in the development of prototypical nanoelectronic devices and, perhaps more importantly, in the study of spatially confined chemical reactions.

Original languageEnglish (US)
Pages (from-to)127-129
Number of pages3
Issue number2
StatePublished - Jan 22 1997
Externally publishedYes

ASJC Scopus subject areas

  • Colloid and Surface Chemistry
  • Physical and Theoretical Chemistry


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