Nanofabrication using computer-assisted design and automated vector-scanning probe lithography

S. Cruchon-Dupeyrat, S. Porthun, Gang-yu Liu

Research output: Contribution to journalArticle

31 Citations (Scopus)

Abstract

This work represents our initial effort towards the fabrication of complex nanopatterns with automated scanning probe lithography (SPL). A multi-mode scanning probe microscope is linked with a computer-controlled vector-scan module to allow precise, automated control of the tip motion. The module is interfaced with computer-assisted design (CAD) and VLSI software, and programming capabilities are developed. We also provide a pathway for integration of our apparatus with external instruments. The capability to rapidly produce complicated nanopatterns is demonstrated using AFM fabrication of thiol self-assembled monolayers.

Original languageEnglish (US)
Pages (from-to)636-642
Number of pages7
JournalApplied Surface Science
Volume175-176
DOIs
StatePublished - May 15 2001
Externally publishedYes

Fingerprint

nanofabrication
Nanotechnology
Lithography
lithography
modules
Scanning
Fabrication
fabrication
scanning
probes
Self assembled monolayers
very large scale integration
programming
Computer programming
Sulfhydryl Compounds
thiols
Microscopes
microscopes
atomic force microscopy
computer programs

Keywords

  • Atomic force microscopy
  • Automated scanning probe lithography
  • Nanofabrication
  • Nanografting
  • Self-assembled monolayers

ASJC Scopus subject areas

  • Physical and Theoretical Chemistry
  • Surfaces, Coatings and Films
  • Condensed Matter Physics

Cite this

Nanofabrication using computer-assisted design and automated vector-scanning probe lithography. / Cruchon-Dupeyrat, S.; Porthun, S.; Liu, Gang-yu.

In: Applied Surface Science, Vol. 175-176, 15.05.2001, p. 636-642.

Research output: Contribution to journalArticle

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