Nanofabrication using computer-assisted design and automated vector-scanning probe lithography

S. Cruchon-Dupeyrat; S. Porthun; Gang-yu Liu

doi:10.1016/S0169-4332(01)00076-9

Nanofabrication using computer-assisted design and automated vector-scanning probe lithography

S. Cruchon-Dupeyrat, S. Porthun, Gang-yu Liu

Research output: Contribution to journal › Article › peer-review

31 Scopus citations

Abstract

This work represents our initial effort towards the fabrication of complex nanopatterns with automated scanning probe lithography (SPL). A multi-mode scanning probe microscope is linked with a computer-controlled vector-scan module to allow precise, automated control of the tip motion. The module is interfaced with computer-assisted design (CAD) and VLSI software, and programming capabilities are developed. We also provide a pathway for integration of our apparatus with external instruments. The capability to rapidly produce complicated nanopatterns is demonstrated using AFM fabrication of thiol self-assembled monolayers.

Original language	English (US)
Pages (from-to)	636-642
Number of pages	7
Journal	Applied Surface Science
Volume	175-176
DOIs	https://doi.org/10.1016/S0169-4332(01)00076-9
State	Published - May 15 2001
Externally published	Yes

Keywords

Atomic force microscopy
Automated scanning probe lithography
Nanofabrication
Nanografting
Self-assembled monolayers

ASJC Scopus subject areas

Physical and Theoretical Chemistry
Surfaces, Coatings and Films
Condensed Matter Physics

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abstract = "This work represents our initial effort towards the fabrication of complex nanopatterns with automated scanning probe lithography (SPL). A multi-mode scanning probe microscope is linked with a computer-controlled vector-scan module to allow precise, automated control of the tip motion. The module is interfaced with computer-assisted design (CAD) and VLSI software, and programming capabilities are developed. We also provide a pathway for integration of our apparatus with external instruments. The capability to rapidly produce complicated nanopatterns is demonstrated using AFM fabrication of thiol self-assembled monolayers.",

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author = "S. Cruchon-Dupeyrat and S. Porthun and Gang-yu Liu",

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AU - Cruchon-Dupeyrat, S.

AU - Porthun, S.

AU - Liu, Gang-yu

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Y1 - 2001/5/15

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AB - This work represents our initial effort towards the fabrication of complex nanopatterns with automated scanning probe lithography (SPL). A multi-mode scanning probe microscope is linked with a computer-controlled vector-scan module to allow precise, automated control of the tip motion. The module is interfaced with computer-assisted design (CAD) and VLSI software, and programming capabilities are developed. We also provide a pathway for integration of our apparatus with external instruments. The capability to rapidly produce complicated nanopatterns is demonstrated using AFM fabrication of thiol self-assembled monolayers.

KW - Atomic force microscopy

KW - Automated scanning probe lithography

KW - Nanofabrication

KW - Nanografting

KW - Self-assembled monolayers

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Nanofabrication using computer-assisted design and automated vector-scanning probe lithography

Abstract

Keywords

ASJC Scopus subject areas

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