Nanofabrication using computer-assisted design and automated vector-scanning probe lithography

S. Cruchon-Dupeyrat, S. Porthun, Gang-yu Liu

Research output: Contribution to journalArticlepeer-review

31 Scopus citations


This work represents our initial effort towards the fabrication of complex nanopatterns with automated scanning probe lithography (SPL). A multi-mode scanning probe microscope is linked with a computer-controlled vector-scan module to allow precise, automated control of the tip motion. The module is interfaced with computer-assisted design (CAD) and VLSI software, and programming capabilities are developed. We also provide a pathway for integration of our apparatus with external instruments. The capability to rapidly produce complicated nanopatterns is demonstrated using AFM fabrication of thiol self-assembled monolayers.

Original languageEnglish (US)
Pages (from-to)636-642
Number of pages7
JournalApplied Surface Science
StatePublished - May 15 2001
Externally publishedYes


  • Atomic force microscopy
  • Automated scanning probe lithography
  • Nanofabrication
  • Nanografting
  • Self-assembled monolayers

ASJC Scopus subject areas

  • Physical and Theoretical Chemistry
  • Surfaces, Coatings and Films
  • Condensed Matter Physics


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