Abstract
This work represents our initial effort towards the fabrication of complex nanopatterns with automated scanning probe lithography (SPL). A multi-mode scanning probe microscope is linked with a computer-controlled vector-scan module to allow precise, automated control of the tip motion. The module is interfaced with computer-assisted design (CAD) and VLSI software, and programming capabilities are developed. We also provide a pathway for integration of our apparatus with external instruments. The capability to rapidly produce complicated nanopatterns is demonstrated using AFM fabrication of thiol self-assembled monolayers.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 636-642 |
| Number of pages | 7 |
| Journal | Applied Surface Science |
| Volume | 175-176 |
| DOIs | |
| State | Published - May 15 2001 |
| Externally published | Yes |
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Keywords
- Atomic force microscopy
- Automated scanning probe lithography
- Nanofabrication
- Nanografting
- Self-assembled monolayers
ASJC Scopus subject areas
- Physical and Theoretical Chemistry
- Surfaces, Coatings and Films
- Condensed Matter Physics
Cite this
Nanofabrication using computer-assisted design and automated vector-scanning probe lithography. / Cruchon-Dupeyrat, S.; Porthun, S.; Liu, Gang-yu.
In: Applied Surface Science, Vol. 175-176, 15.05.2001, p. 636-642.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Nanofabrication using computer-assisted design and automated vector-scanning probe lithography
AU - Cruchon-Dupeyrat, S.
AU - Porthun, S.
AU - Liu, Gang-yu
PY - 2001/5/15
Y1 - 2001/5/15
N2 - This work represents our initial effort towards the fabrication of complex nanopatterns with automated scanning probe lithography (SPL). A multi-mode scanning probe microscope is linked with a computer-controlled vector-scan module to allow precise, automated control of the tip motion. The module is interfaced with computer-assisted design (CAD) and VLSI software, and programming capabilities are developed. We also provide a pathway for integration of our apparatus with external instruments. The capability to rapidly produce complicated nanopatterns is demonstrated using AFM fabrication of thiol self-assembled monolayers.
AB - This work represents our initial effort towards the fabrication of complex nanopatterns with automated scanning probe lithography (SPL). A multi-mode scanning probe microscope is linked with a computer-controlled vector-scan module to allow precise, automated control of the tip motion. The module is interfaced with computer-assisted design (CAD) and VLSI software, and programming capabilities are developed. We also provide a pathway for integration of our apparatus with external instruments. The capability to rapidly produce complicated nanopatterns is demonstrated using AFM fabrication of thiol self-assembled monolayers.
KW - Atomic force microscopy
KW - Automated scanning probe lithography
KW - Nanofabrication
KW - Nanografting
KW - Self-assembled monolayers
UR - http://www.scopus.com/inward/record.url?scp=0035873694&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0035873694&partnerID=8YFLogxK
U2 - 10.1016/S0169-4332(01)00076-9
DO - 10.1016/S0169-4332(01)00076-9
M3 - Article
VL - 175-176
SP - 636
EP - 642
JO - Applied Surface Science
JF - Applied Surface Science
SN - 0169-4332
ER -