Abstract
This work represents our initial effort towards the fabrication of complex nanopatterns with automated scanning probe lithography (SPL). A multi-mode scanning probe microscope is linked with a computer-controlled vector-scan module to allow precise, automated control of the tip motion. The module is interfaced with computer-assisted design (CAD) and VLSI software, and programming capabilities are developed. We also provide a pathway for integration of our apparatus with external instruments. The capability to rapidly produce complicated nanopatterns is demonstrated using AFM fabrication of thiol self-assembled monolayers.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 636-642 |
| Number of pages | 7 |
| Journal | Applied Surface Science |
| Volume | 175-176 |
| DOIs | |
| State | Published - May 15 2001 |
| Externally published | Yes |
Keywords
- Atomic force microscopy
- Automated scanning probe lithography
- Nanofabrication
- Nanografting
- Self-assembled monolayers
ASJC Scopus subject areas
- Physical and Theoretical Chemistry
- Surfaces, Coatings and Films
- Condensed Matter Physics
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Cite this
Cruchon-Dupeyrat, S., Porthun, S., & Liu, G. (2001). Nanofabrication using computer-assisted design and automated vector-scanning probe lithography. Applied Surface Science, 175-176, 636-642. https://doi.org/10.1016/S0169-4332(01)00076-9