Nanofabrication of self-assembled monolayers using scanning probe lithography

Gang-yu Liu, Song Xu, Yile Qian

Research output: Contribution to journalArticlepeer-review

557 Scopus citations


This Account focuses on our recent and systematic effort in the development of generic scanning probe lithography (SPL)-based methodologies to produce nanopatterns of self-assembled monolayers (SAMs). The key to achieving high spatial precision is to keep the tip - surface interactions strong and local. The approaches used include two AFM-based methods, nanoshaving and nanografting, which rely on the local force, and two STM- based techniques, electron-induced diffusion and desorption, which use tunneling electrons for fabrication. In this Account we discuss the principle of these procedures and the critical steps in controlling local tip - surface interactions. The advantages of SPL will be illustrated through various examples of production and modification of SAM nanopatterns and their potential applications.

Original languageEnglish (US)
Pages (from-to)457-466
Number of pages10
JournalAccounts of Chemical Research
Issue number7
StatePublished - Jul 2000
Externally publishedYes

ASJC Scopus subject areas

  • Chemistry(all)


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