Abstract
Spectral and time-domain fluorescence from biological samples are powerful diagnostic tools. For applications requiring a compact integrated spectrometer, the microoptoelectromechanical system (MOEMS) is an enabling technology. To improve upon previous microspectrometers, a multilayered, folded design is taken here to improve theoretical resolution and throughput. This sub-cm3 prototype, based on MOEMS piezoelectric diffractive micrograting, demonstrates over 100-nm tuning in the visible range. Moreover, it integrates a microlens with f = 2,2 mm within a microoptics package that is fabricated at wafer-level. The microspectrometer capably records both spectral and lifetime information for fluorescence standards fluorescein isothiocyanate (FITC, 2.5 ns) and Rhodamine B (2.9 ns), and also Collagen Type II (2.4 ns).
Original language | English (US) |
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Article number | 5404999 |
Pages (from-to) | 486-488 |
Number of pages | 3 |
Journal | IEEE Photonics Technology Letters |
Volume | 22 |
Issue number | 7 |
DOIs | |
State | Published - Apr 1 2010 |
Keywords
- Microlens
- Microspectrometer
- Multilayer
- Piezoelectric
- Wafer-level packaging
ASJC Scopus subject areas
- Electrical and Electronic Engineering
- Atomic and Molecular Physics, and Optics
- Electronic, Optical and Magnetic Materials