Multilayered MOEMS tunable spectrometer for fluorescence lifetime detection

Joe Fu Jiou Lo; Pramod Butte; Qiyin Fang; Shih Jui Chen; Thanassis Papaioanou; Eun Sok Kim; Martin Gundersen; Laura Marcu

doi:10.1109/LPT.2010.2040995

Multilayered MOEMS tunable spectrometer for fluorescence lifetime detection

Joe Fu Jiou Lo, Pramod Butte, Qiyin Fang, Shih Jui Chen, Thanassis Papaioanou, Eun Sok Kim, Martin Gundersen, Laura Marcu

Neurological Surgery

Research output: Contribution to journal › Article › peer-review

Abstract

Spectral and time-domain fluorescence from biological samples are powerful diagnostic tools. For applications requiring a compact integrated spectrometer, the microoptoelectromechanical system (MOEMS) is an enabling technology. To improve upon previous microspectrometers, a multilayered, folded design is taken here to improve theoretical resolution and throughput. This sub-cm3 prototype, based on MOEMS piezoelectric diffractive micrograting, demonstrates over 100-nm tuning in the visible range. Moreover, it integrates a microlens with f = 2,2 mm within a microoptics package that is fabricated at wafer-level. The microspectrometer capably records both spectral and lifetime information for fluorescence standards fluorescein isothiocyanate (FITC, 2.5 ns) and Rhodamine B (2.9 ns), and also Collagen Type II (2.4 ns).

Original language	English (US)
Article number	5404999
Pages (from-to)	486-488
Number of pages	3
Journal	IEEE Photonics Technology Letters
Volume	22
Issue number	7
DOIs	https://doi.org/10.1109/LPT.2010.2040995
State	Published - Apr 1 2010

Keywords

Microlens
Microspectrometer
Multilayer
Piezoelectric
Wafer-level packaging

ASJC Scopus subject areas

Electrical and Electronic Engineering
Atomic and Molecular Physics, and Optics
Electronic, Optical and Magnetic Materials

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title = "Multilayered MOEMS tunable spectrometer for fluorescence lifetime detection",

abstract = "Spectral and time-domain fluorescence from biological samples are powerful diagnostic tools. For applications requiring a compact integrated spectrometer, the microoptoelectromechanical system (MOEMS) is an enabling technology. To improve upon previous microspectrometers, a multilayered, folded design is taken here to improve theoretical resolution and throughput. This sub-cm3 prototype, based on MOEMS piezoelectric diffractive micrograting, demonstrates over 100-nm tuning in the visible range. Moreover, it integrates a microlens with f = 2,2 mm within a microoptics package that is fabricated at wafer-level. The microspectrometer capably records both spectral and lifetime information for fluorescence standards fluorescein isothiocyanate (FITC, 2.5 ns) and Rhodamine B (2.9 ns), and also Collagen Type II (2.4 ns).",

keywords = "Microlens, Microspectrometer, Multilayer, Piezoelectric, Wafer-level packaging",

author = "Lo, {Joe Fu Jiou} and Pramod Butte and Qiyin Fang and Chen, {Shih Jui} and Thanassis Papaioanou and Kim, {Eun Sok} and Martin Gundersen and Laura Marcu",

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AU - Lo, Joe Fu Jiou

AU - Butte, Pramod

AU - Fang, Qiyin

AU - Chen, Shih Jui

AU - Papaioanou, Thanassis

AU - Kim, Eun Sok

AU - Gundersen, Martin

AU - Marcu, Laura

PY - 2010/4/1

Y1 - 2010/4/1

N2 - Spectral and time-domain fluorescence from biological samples are powerful diagnostic tools. For applications requiring a compact integrated spectrometer, the microoptoelectromechanical system (MOEMS) is an enabling technology. To improve upon previous microspectrometers, a multilayered, folded design is taken here to improve theoretical resolution and throughput. This sub-cm3 prototype, based on MOEMS piezoelectric diffractive micrograting, demonstrates over 100-nm tuning in the visible range. Moreover, it integrates a microlens with f = 2,2 mm within a microoptics package that is fabricated at wafer-level. The microspectrometer capably records both spectral and lifetime information for fluorescence standards fluorescein isothiocyanate (FITC, 2.5 ns) and Rhodamine B (2.9 ns), and also Collagen Type II (2.4 ns).

AB - Spectral and time-domain fluorescence from biological samples are powerful diagnostic tools. For applications requiring a compact integrated spectrometer, the microoptoelectromechanical system (MOEMS) is an enabling technology. To improve upon previous microspectrometers, a multilayered, folded design is taken here to improve theoretical resolution and throughput. This sub-cm3 prototype, based on MOEMS piezoelectric diffractive micrograting, demonstrates over 100-nm tuning in the visible range. Moreover, it integrates a microlens with f = 2,2 mm within a microoptics package that is fabricated at wafer-level. The microspectrometer capably records both spectral and lifetime information for fluorescence standards fluorescein isothiocyanate (FITC, 2.5 ns) and Rhodamine B (2.9 ns), and also Collagen Type II (2.4 ns).

KW - Microlens

KW - Microspectrometer

KW - Multilayer

KW - Piezoelectric

KW - Wafer-level packaging

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Multilayered MOEMS tunable spectrometer for fluorescence lifetime detection

Abstract

Keywords

ASJC Scopus subject areas

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