Multi-cantilever-driven rotational micrograting for MOEMS spectrometer

Joe F. Lo; Shih Jui Chen; Hongyu Yu; Derrick Chi; Chuang Yuan Lee; Laura Marcu; Eun Sok Kim; Martin Gundersen

doi:10.1109/SENSOR.2007.4300659

Multi-cantilever-driven rotational micrograting for MOEMS spectrometer

Joe F. Lo, Shih Jui Chen, Hongyu Yu, Derrick Chi, Chuang Yuan Lee, Laura Marcu, Eun Sok Kim, Martin Gundersen

Neurological Surgery

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

4 Scopus citations

Abstract

For the purpose of detecting biological fluorescence, a rotational actuator with integrated diffraction grating is designed as the central part of a MOEMS spectrometer. In order to produce scanning with a lithographically defined micrograting, angular displacement is produced with multiple balanced beams placed in opposition around a semifloating pivot point. Piezoelectrically driven, the beams rotate a suspended micro grating linearly with voltage, directly tuning the angularly spread spectral outputs. The design advantages, optimizations and fabrication are discussed. The fabricated actuator is used in a fluorescence scanning of paper cellulose fibers and Rhodamine B dye, and shown to be effective in rotating a diffraction grating for fluorescence spectroscopy.

Original language	English (US)
Title of host publication	TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems
Pages	2421-2424
Number of pages	4
DOIs	https://doi.org/10.1109/SENSOR.2007.4300659
State	Published - 2007
Event	4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07 - Lyon, France Duration: Jun 10 2007 → Jun 14 2007

Other

Other	4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07
Country	France
City	Lyon
Period	6/10/07 → 6/14/07

Keywords

Cantilever
Diffraction
Fluorescence
Grating
Piezoelectric
Rotational actuation
Spectrometer

ASJC Scopus subject areas

Control and Systems Engineering
Electrical and Electronic Engineering

Access to Document

10.1109/SENSOR.2007.4300659

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Cite this

Multi-cantilever-driven rotational micrograting for MOEMS spectrometer. / Lo, Joe F.; Chen, Shih Jui; Yu, Hongyu; Chi, Derrick; Lee, Chuang Yuan; Marcu, Laura; Kim, Eun Sok; Gundersen, Martin.

TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems. 2007. p. 2421-2424 4300659.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Lo, JF, Chen, SJ, Yu, H, Chi, D, Lee, CY, Marcu, L, Kim, ES & Gundersen, M 2007, Multi-cantilever-driven rotational micrograting for MOEMS spectrometer. in TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems., 4300659, pp. 2421-2424, 4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07, Lyon, France, 6/10/07. https://doi.org/10.1109/SENSOR.2007.4300659

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abstract = "For the purpose of detecting biological fluorescence, a rotational actuator with integrated diffraction grating is designed as the central part of a MOEMS spectrometer. In order to produce scanning with a lithographically defined micrograting, angular displacement is produced with multiple balanced beams placed in opposition around a semifloating pivot point. Piezoelectrically driven, the beams rotate a suspended micro grating linearly with voltage, directly tuning the angularly spread spectral outputs. The design advantages, optimizations and fabrication are discussed. The fabricated actuator is used in a fluorescence scanning of paper cellulose fibers and Rhodamine B dye, and shown to be effective in rotating a diffraction grating for fluorescence spectroscopy.",

keywords = "Cantilever, Diffraction, Fluorescence, Grating, Piezoelectric, Rotational actuation, Spectrometer",

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AU - Marcu, Laura

AU - Kim, Eun Sok

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AB - For the purpose of detecting biological fluorescence, a rotational actuator with integrated diffraction grating is designed as the central part of a MOEMS spectrometer. In order to produce scanning with a lithographically defined micrograting, angular displacement is produced with multiple balanced beams placed in opposition around a semifloating pivot point. Piezoelectrically driven, the beams rotate a suspended micro grating linearly with voltage, directly tuning the angularly spread spectral outputs. The design advantages, optimizations and fabrication are discussed. The fabricated actuator is used in a fluorescence scanning of paper cellulose fibers and Rhodamine B dye, and shown to be effective in rotating a diffraction grating for fluorescence spectroscopy.

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KW - Rotational actuation

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