Abstract
For the purpose of detecting biological fluorescence, a rotational actuator with integrated diffraction grating is designed as the central part of a MOEMS spectrometer. In order to produce scanning with a lithographically defined micrograting, angular displacement is produced with multiple balanced beams placed in opposition around a semifloating pivot point. Piezoelectrically driven, the beams rotate a suspended micro grating linearly with voltage, directly tuning the angularly spread spectral outputs. The design advantages, optimizations and fabrication are discussed. The fabricated actuator is used in a fluorescence scanning of paper cellulose fibers and Rhodamine B dye, and shown to be effective in rotating a diffraction grating for fluorescence spectroscopy.
Original language | English (US) |
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Title of host publication | TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems |
Pages | 2421-2424 |
Number of pages | 4 |
DOIs | |
State | Published - 2007 |
Event | 4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07 - Lyon, France Duration: Jun 10 2007 → Jun 14 2007 |
Other
Other | 4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07 |
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Country | France |
City | Lyon |
Period | 6/10/07 → 6/14/07 |
Keywords
- Cantilever
- Diffraction
- Fluorescence
- Grating
- Piezoelectric
- Rotational actuation
- Spectrometer
ASJC Scopus subject areas
- Control and Systems Engineering
- Electrical and Electronic Engineering