Mitigation of tensile failure in released nanoporous metal microstructures via thermal treatment

Jianzhong Zhu, Erkin Seker, Hilary Bart-Smith, Matthew R. Begley, Robert G. Kelly, Giovanni Zangari, Whye Kei Lye, Michael L. Reed

Research output: Contribution to journalArticle

30 Scopus citations

Abstract

The authors have developed a method to fabricate released microstructures of nanoporous Au (np-Au) by dealloying a Au-Ag alloy film patterned over a sacrificial Al layer. Doubly clamped bridges fail during dealloying owing to large tensile stresses induced during the dealloying process. Thermal treatments of released microstructures prior to dealloying generate sufficient compressive stress to induce plastic buckling. This buckling compensates the tensile stresses generated during the dealloying process, thus mitigating fracture of the np-Au.

Original languageEnglish (US)
Article number133104
JournalApplied Physics Letters
Volume89
Issue number13
DOIs
StatePublished - Oct 6 2006
Externally publishedYes

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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    Zhu, J., Seker, E., Bart-Smith, H., Begley, M. R., Kelly, R. G., Zangari, G., Lye, W. K., & Reed, M. L. (2006). Mitigation of tensile failure in released nanoporous metal microstructures via thermal treatment. Applied Physics Letters, 89(13), [133104]. https://doi.org/10.1063/1.2357586