Microflotronics

A flexible, transparent, pressure-sensitive microfluidic film

Ruya Li, Baoqing Nie, Philip Digiglio, Tingrui Pan

Research output: Contribution to journalArticle

33 Citations (Scopus)

Abstract

There is an increasing demand for sensitive, flexible, and low-cost pressure sensing solutions for health monitoring, wearable sensing, robotic and prosthetic applications. Here, the first flexible and pressure-sensitive microfluidic film is reported, referred to as a microflotronic, with high transparency and seamless integratability with the state-of-the-art microelectronics. The microflotronic film represents the initial effort to utilize a continuous microfluidic layer as the sensing elements for large-area dynamic pressure mapping applications, and meanwhile an ultrahigh sensitivity of 0.45 kPa -1 has been achieved in a compact, flexible, and transparent packaging. The response time of the device is in the millisecond range, which is at least an order of magnitude faster than that of its conventional flexible solid-state counterparts. In addition, the fabrication process of the device is fully compatible with the industrial-scale manufacturing of capacitive touchscreen devices and liquid-crystal displays. The overall device packaging can be as thin as 200 μm with an optical transparency greater than 80%. Several practical applications were successfully demonstrated, including surface topology mapping and dynamic blood pressure monitoring. The microflotronic devices offer an alternative approach to the solid-state pressure sensors, by offering an unprecedented sensitivity and ultrafast response time in a completely transparent, flexible and adaptive platform.

Original languageEnglish (US)
Pages (from-to)6195-6203
Number of pages9
JournalAdvanced Functional Materials
Volume24
Issue number39
DOIs
StatePublished - Oct 22 2014

Fingerprint

Microfluidics
Transparency
Packaging
dynamic pressure
Solid-state sensors
Touch screens
packaging
Monitoring
Blood pressure
Pressure sensors
Prosthetics
Liquid crystal displays
Microelectronics
Robotics
solid state
blood pressure
Topology
Health
sensitivity
Fabrication

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Biomaterials
  • Condensed Matter Physics
  • Electrochemistry

Cite this

Microflotronics : A flexible, transparent, pressure-sensitive microfluidic film. / Li, Ruya; Nie, Baoqing; Digiglio, Philip; Pan, Tingrui.

In: Advanced Functional Materials, Vol. 24, No. 39, 22.10.2014, p. 6195-6203.

Research output: Contribution to journalArticle

Li, Ruya ; Nie, Baoqing ; Digiglio, Philip ; Pan, Tingrui. / Microflotronics : A flexible, transparent, pressure-sensitive microfluidic film. In: Advanced Functional Materials. 2014 ; Vol. 24, No. 39. pp. 6195-6203.
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