Abstract
In this paper, we present microfabrication of a novel photopatternable conductive PDMS material with silver powder as conductive filler and benzophenone as photosensitive component, employing standard photolithography approach. An array of miniaturized capacitive pressure sensors is micromachined onto flexible polymeric transparency using this approach. Highest conductivity of -10 4 S.m -1 and minimal feature resolution of 60 μm have been successfully achieved. In addition, a thermal compression step can mold the microfabricated device into a desired shape (e.g., contact lens). The unique combination of physical properties from both silver filler and PDMS matrix along with photopatternability makes the conductive PDMS composite an excellent material for biological and clinical sensing applications.
Original language | English (US) |
---|---|
Title of host publication | 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009 |
Pages | 731-734 |
Number of pages | 4 |
DOIs | |
State | Published - Oct 12 2009 |
Event | 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009 - Shenzhen, China Duration: Jan 5 2009 → Jan 8 2009 |
Other
Other | 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009 |
---|---|
Country | China |
City | Shenzhen |
Period | 1/5/09 → 1/8/09 |
Keywords
- Conductive photoresist
- Microfabrication
- Photolithography
- Polydimethylsiloxane (PDMS)
- Silver powder
ASJC Scopus subject areas
- Electrical and Electronic Engineering