Microfabrication of conductive PDMS on flexible substrates for biomedical applications

Hailin Cong, Tingrui Pan

Research output: Chapter in Book/Report/Conference proceedingConference contribution

14 Citations (Scopus)

Abstract

In this paper, we present microfabrication of a novel photopatternable conductive PDMS material with silver powder as conductive filler and benzophenone as photosensitive component, employing standard photolithography approach. An array of miniaturized capacitive pressure sensors is micromachined onto flexible polymeric transparency using this approach. Highest conductivity of -10 4 S.m -1 and minimal feature resolution of 60 μm have been successfully achieved. In addition, a thermal compression step can mold the microfabricated device into a desired shape (e.g., contact lens). The unique combination of physical properties from both silver filler and PDMS matrix along with photopatternability makes the conductive PDMS composite an excellent material for biological and clinical sensing applications.

Original languageEnglish (US)
Title of host publication4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009
Pages731-734
Number of pages4
DOIs
StatePublished - Oct 12 2009
Event4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009 - Shenzhen, China
Duration: Jan 5 2009Jan 8 2009

Other

Other4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009
CountryChina
CityShenzhen
Period1/5/091/8/09

Fingerprint

Microfabrication
Fillers
Silver
Contact lenses
Conductive materials
Capacitive sensors
Pressure sensors
Photolithography
Substrates
Transparency
Physical properties
Powders
Composite materials
Hot Temperature

Keywords

  • Conductive photoresist
  • Microfabrication
  • Photolithography
  • Polydimethylsiloxane (PDMS)
  • Silver powder

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

Cite this

Cong, H., & Pan, T. (2009). Microfabrication of conductive PDMS on flexible substrates for biomedical applications. In 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009 (pp. 731-734). [5068682] https://doi.org/10.1109/NEMS.2009.5068682

Microfabrication of conductive PDMS on flexible substrates for biomedical applications. / Cong, Hailin; Pan, Tingrui.

4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009. 2009. p. 731-734 5068682.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Cong, H & Pan, T 2009, Microfabrication of conductive PDMS on flexible substrates for biomedical applications. in 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009., 5068682, pp. 731-734, 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009, Shenzhen, China, 1/5/09. https://doi.org/10.1109/NEMS.2009.5068682
Cong H, Pan T. Microfabrication of conductive PDMS on flexible substrates for biomedical applications. In 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009. 2009. p. 731-734. 5068682 https://doi.org/10.1109/NEMS.2009.5068682
Cong, Hailin ; Pan, Tingrui. / Microfabrication of conductive PDMS on flexible substrates for biomedical applications. 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009. 2009. pp. 731-734
@inproceedings{82c67037d731426592b5c6f71a27f412,
title = "Microfabrication of conductive PDMS on flexible substrates for biomedical applications",
abstract = "In this paper, we present microfabrication of a novel photopatternable conductive PDMS material with silver powder as conductive filler and benzophenone as photosensitive component, employing standard photolithography approach. An array of miniaturized capacitive pressure sensors is micromachined onto flexible polymeric transparency using this approach. Highest conductivity of -10 4 S.m -1 and minimal feature resolution of 60 μm have been successfully achieved. In addition, a thermal compression step can mold the microfabricated device into a desired shape (e.g., contact lens). The unique combination of physical properties from both silver filler and PDMS matrix along with photopatternability makes the conductive PDMS composite an excellent material for biological and clinical sensing applications.",
keywords = "Conductive photoresist, Microfabrication, Photolithography, Polydimethylsiloxane (PDMS), Silver powder",
author = "Hailin Cong and Tingrui Pan",
year = "2009",
month = "10",
day = "12",
doi = "10.1109/NEMS.2009.5068682",
language = "English (US)",
isbn = "9781424446308",
pages = "731--734",
booktitle = "4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009",

}

TY - GEN

T1 - Microfabrication of conductive PDMS on flexible substrates for biomedical applications

AU - Cong, Hailin

AU - Pan, Tingrui

PY - 2009/10/12

Y1 - 2009/10/12

N2 - In this paper, we present microfabrication of a novel photopatternable conductive PDMS material with silver powder as conductive filler and benzophenone as photosensitive component, employing standard photolithography approach. An array of miniaturized capacitive pressure sensors is micromachined onto flexible polymeric transparency using this approach. Highest conductivity of -10 4 S.m -1 and minimal feature resolution of 60 μm have been successfully achieved. In addition, a thermal compression step can mold the microfabricated device into a desired shape (e.g., contact lens). The unique combination of physical properties from both silver filler and PDMS matrix along with photopatternability makes the conductive PDMS composite an excellent material for biological and clinical sensing applications.

AB - In this paper, we present microfabrication of a novel photopatternable conductive PDMS material with silver powder as conductive filler and benzophenone as photosensitive component, employing standard photolithography approach. An array of miniaturized capacitive pressure sensors is micromachined onto flexible polymeric transparency using this approach. Highest conductivity of -10 4 S.m -1 and minimal feature resolution of 60 μm have been successfully achieved. In addition, a thermal compression step can mold the microfabricated device into a desired shape (e.g., contact lens). The unique combination of physical properties from both silver filler and PDMS matrix along with photopatternability makes the conductive PDMS composite an excellent material for biological and clinical sensing applications.

KW - Conductive photoresist

KW - Microfabrication

KW - Photolithography

KW - Polydimethylsiloxane (PDMS)

KW - Silver powder

UR - http://www.scopus.com/inward/record.url?scp=70349690774&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=70349690774&partnerID=8YFLogxK

U2 - 10.1109/NEMS.2009.5068682

DO - 10.1109/NEMS.2009.5068682

M3 - Conference contribution

AN - SCOPUS:70349690774

SN - 9781424446308

SP - 731

EP - 734

BT - 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009

ER -