Microfabrication of conductive PDMS on flexible substrates for biomedical applications

Hailin Cong; Tingrui Pan

doi:10.1109/NEMS.2009.5068682

Microfabrication of conductive PDMS on flexible substrates for biomedical applications

Hailin Cong, Tingrui Pan

Biomedical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

14 Scopus citations

Abstract

In this paper, we present microfabrication of a novel photopatternable conductive PDMS material with silver powder as conductive filler and benzophenone as photosensitive component, employing standard photolithography approach. An array of miniaturized capacitive pressure sensors is micromachined onto flexible polymeric transparency using this approach. Highest conductivity of -10 ⁴ S.m ^-1 and minimal feature resolution of 60 μm have been successfully achieved. In addition, a thermal compression step can mold the microfabricated device into a desired shape (e.g., contact lens). The unique combination of physical properties from both silver filler and PDMS matrix along with photopatternability makes the conductive PDMS composite an excellent material for biological and clinical sensing applications.

Original language	English (US)
Title of host publication	4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009
Pages	731-734
Number of pages	4
DOIs	https://doi.org/10.1109/NEMS.2009.5068682
State	Published - Oct 12 2009
Event	4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009 - Shenzhen, China Duration: Jan 5 2009 → Jan 8 2009

Other

Other	4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009
Country	China
City	Shenzhen
Period	1/5/09 → 1/8/09

Keywords

Conductive photoresist
Microfabrication
Photolithography
Polydimethylsiloxane (PDMS)
Silver powder

ASJC Scopus subject areas

Electrical and Electronic Engineering

Access to Document

10.1109/NEMS.2009.5068682

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Cite this

Cong, H & Pan, T 2009, Microfabrication of conductive PDMS on flexible substrates for biomedical applications. in 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009., 5068682, pp. 731-734, 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009, Shenzhen, China, 1/5/09. https://doi.org/10.1109/NEMS.2009.5068682

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abstract = "In this paper, we present microfabrication of a novel photopatternable conductive PDMS material with silver powder as conductive filler and benzophenone as photosensitive component, employing standard photolithography approach. An array of miniaturized capacitive pressure sensors is micromachined onto flexible polymeric transparency using this approach. Highest conductivity of -10 4 S.m -1 and minimal feature resolution of 60 μm have been successfully achieved. In addition, a thermal compression step can mold the microfabricated device into a desired shape (e.g., contact lens). The unique combination of physical properties from both silver filler and PDMS matrix along with photopatternability makes the conductive PDMS composite an excellent material for biological and clinical sensing applications.",

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AB - In this paper, we present microfabrication of a novel photopatternable conductive PDMS material with silver powder as conductive filler and benzophenone as photosensitive component, employing standard photolithography approach. An array of miniaturized capacitive pressure sensors is micromachined onto flexible polymeric transparency using this approach. Highest conductivity of -10 4 S.m -1 and minimal feature resolution of 60 μm have been successfully achieved. In addition, a thermal compression step can mold the microfabricated device into a desired shape (e.g., contact lens). The unique combination of physical properties from both silver filler and PDMS matrix along with photopatternability makes the conductive PDMS composite an excellent material for biological and clinical sensing applications.

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