Microfabrication of conductive PDMS on flexible substrates for biomedical applications

Hailin Cong, Tingrui Pan

Research output: Chapter in Book/Report/Conference proceedingConference contribution

14 Scopus citations

Abstract

In this paper, we present microfabrication of a novel photopatternable conductive PDMS material with silver powder as conductive filler and benzophenone as photosensitive component, employing standard photolithography approach. An array of miniaturized capacitive pressure sensors is micromachined onto flexible polymeric transparency using this approach. Highest conductivity of -10 4 S.m -1 and minimal feature resolution of 60 μm have been successfully achieved. In addition, a thermal compression step can mold the microfabricated device into a desired shape (e.g., contact lens). The unique combination of physical properties from both silver filler and PDMS matrix along with photopatternability makes the conductive PDMS composite an excellent material for biological and clinical sensing applications.

Original languageEnglish (US)
Title of host publication4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009
Pages731-734
Number of pages4
DOIs
StatePublished - Oct 12 2009
Event4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009 - Shenzhen, China
Duration: Jan 5 2009Jan 8 2009

Other

Other4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009
CountryChina
CityShenzhen
Period1/5/091/8/09

Keywords

  • Conductive photoresist
  • Microfabrication
  • Photolithography
  • Polydimethylsiloxane (PDMS)
  • Silver powder

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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