Abstract
Soft x-ray microscopy offers the potential of extending imaging system resolutions below 100 nm with less destructive specimen preparation than electron microscopy. Imaging in the wavelength regime between 10 and 100 angstroms has been demonstrated with several techniques including scanning microscopy, imaging zone-plate microscopy, and Gabor or Fourier holography. Good transverse resolution has been demonstrated in these systems ( ι 100 nm) but the longitudinal or depth resolution has been very limited. Our approach to improving depth resolution is to combine multiple views of the object topographically. These systems present unique problems for computational image formation and enhancement.
| Original language | English (US) |
|---|---|
| Title of host publication | Proceedings of SPIE - The International Society for Optical Engineering |
| Place of Publication | Bellingham, WA, United States |
| Publisher | Publ by Int Soc for Optical Engineering |
| Pages | 234-240 |
| Number of pages | 7 |
| Volume | 1741 |
| ISBN (Print) | 0819409146 |
| State | Published - 1993 |
| Externally published | Yes |
| Event | Soft X-Ray Microscopy - San Diego, CA, USA Duration: Jul 19 1992 → Jul 21 1992 |
Other
| Other | Soft X-Ray Microscopy |
|---|---|
| City | San Diego, CA, USA |
| Period | 7/19/92 → 7/21/92 |
ASJC Scopus subject areas
- Electrical and Electronic Engineering
- Condensed Matter Physics