Hierarchical micro- and nanoscale structures on surfaces produced using a one-step pattern transfer process

Jie Ren Li, Nai Ning Yin, Gang-yu Liu

Research output: Contribution to journalArticle

10 Scopus citations

Abstract

A one-step pattern transfer process was developed to produce arrays of hierarchical micro- and nanostructures of organosilanes. The method is based on vapor deposition through polydimethylsiloxane stamps coated with close-packed nanospheres and, as such, creating hierarchical microscale and nanoscale templates, respectively. This method offers intrinsic advantages of simplicity to be used in any laboratory environment and high throughput, that is, a 1 in. wafer can be covered in 6 h. In addition, the size and geometry can be controlled via knowledge of microcontact printing and particle lithography. Finally, the approach is generic in nature and may be utilized to produce designed functionalities.

Original languageEnglish (US)
Pages (from-to)289-294
Number of pages6
JournalJournal of Physical Chemistry Letters
Volume2
Issue number4
DOIs
StatePublished - Feb 17 2011

ASJC Scopus subject areas

  • Materials Science(all)

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