Generation of soft x-ray radiation by laser irradiation of a gas puff xenon target

Henryk Fiedorowicz; Andrzej Bartnik; Miroslaw Szczurek; Piotr Parys; Peter Celliers; Luiz B. Da Silva; Stanley J. Mrowka; C. Brent Dane; Dennis L Matthews; Joseph A. Abate

Generation of soft x-ray radiation by laser irradiation of a gas puff xenon target

Henryk Fiedorowicz, Andrzej Bartnik, Miroslaw Szczurek, Piotr Parys, Peter Celliers, Luiz B. Da Silva, Stanley J. Mrowka, C. Brent Dane, Dennis L Matthews, Joseph A. Abate

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

3 Scopus citations

Abstract

Plasmas produced from laser-irradiated gas puff xenon targets, created by pulsed injection of xenon with high-pressure solenoid valve, offer the possibility of realizing a debrisless x-ray point source for the x-ray lithography applications. In this paper we present results of the experimental investigations on the x-ray generation from a gas puff xenon target irradiated with nanosecond high-power laser pulses produced using two different laser facilities; a Nd:glass laser operating at 1.06 μm, which generated 10-15 J pulses in 1 ns FWHM, and Nd:glass slab laser, producing pulses of 10 ns duration with energy reaching 12 J for a 0.53 μm wavelength or 20 J for 1.05 μm. To study the x-ray emission different x-ray diagnostic methods have been used. X-ray spectra were registered using a flat CsAP crystal spectrograph with an x-ray film or a curved KAP crystal spectrograph with a convex curvature coupled to an x-ray CCD readout detector. X-ray images have been taken using pinhole cameras with an x-ray film or a CCD array. X-ray yield was measured with the use of semiconductor detectors (silicon photodiodes or diamond photoconductors).

Original language	English (US)
Title of host publication	Proceedings of SPIE - The International Society for Optical Engineering
Pages	60-69
Number of pages	10
Volume	2523
State	Published - 1995
Externally published	Yes
Event	Applications of Laser Plasma Radiation II - San Diego, CA, USA Duration: Jul 12 1995 → Jul 14 1995

Other

Other	Applications of Laser Plasma Radiation II
City	San Diego, CA, USA
Period	7/12/95 → 7/14/95

ASJC Scopus subject areas

Electrical and Electronic Engineering
Condensed Matter Physics

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Fiedorowicz, H., Bartnik, A., Szczurek, M., Parys, P., Celliers, P., Da Silva, L. B., Mrowka, S. J., Dane, C. B., Matthews, D. L., & Abate, J. A. (1995). Generation of soft x-ray radiation by laser irradiation of a gas puff xenon target. In Proceedings of SPIE - The International Society for Optical Engineering (Vol. 2523, pp. 60-69)

Generation of soft x-ray radiation by laser irradiation of a gas puff xenon target. / Fiedorowicz, Henryk; Bartnik, Andrzej; Szczurek, Miroslaw; Parys, Piotr; Celliers, Peter; Da Silva, Luiz B.; Mrowka, Stanley J.; Dane, C. Brent; Matthews, Dennis L; Abate, Joseph A.

Proceedings of SPIE - The International Society for Optical Engineering. Vol. 2523 1995. p. 60-69.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Fiedorowicz, H, Bartnik, A, Szczurek, M, Parys, P, Celliers, P, Da Silva, LB, Mrowka, SJ, Dane, CB, Matthews, DL & Abate, JA 1995, Generation of soft x-ray radiation by laser irradiation of a gas puff xenon target. in Proceedings of SPIE - The International Society for Optical Engineering. vol. 2523, pp. 60-69, Applications of Laser Plasma Radiation II, San Diego, CA, USA, 7/12/95.

Fiedorowicz, Henryk ; Bartnik, Andrzej ; Szczurek, Miroslaw ; Parys, Piotr ; Celliers, Peter ; Da Silva, Luiz B. ; Mrowka, Stanley J. ; Dane, C. Brent ; Matthews, Dennis L ; Abate, Joseph A. / Generation of soft x-ray radiation by laser irradiation of a gas puff xenon target. Proceedings of SPIE - The International Society for Optical Engineering. Vol. 2523 1995. pp. 60-69

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title = "Generation of soft x-ray radiation by laser irradiation of a gas puff xenon target",

abstract = "Plasmas produced from laser-irradiated gas puff xenon targets, created by pulsed injection of xenon with high-pressure solenoid valve, offer the possibility of realizing a debrisless x-ray point source for the x-ray lithography applications. In this paper we present results of the experimental investigations on the x-ray generation from a gas puff xenon target irradiated with nanosecond high-power laser pulses produced using two different laser facilities; a Nd:glass laser operating at 1.06 μm, which generated 10-15 J pulses in 1 ns FWHM, and Nd:glass slab laser, producing pulses of 10 ns duration with energy reaching 12 J for a 0.53 μm wavelength or 20 J for 1.05 μm. To study the x-ray emission different x-ray diagnostic methods have been used. X-ray spectra were registered using a flat CsAP crystal spectrograph with an x-ray film or a curved KAP crystal spectrograph with a convex curvature coupled to an x-ray CCD readout detector. X-ray images have been taken using pinhole cameras with an x-ray film or a CCD array. X-ray yield was measured with the use of semiconductor detectors (silicon photodiodes or diamond photoconductors).",

author = "Henryk Fiedorowicz and Andrzej Bartnik and Miroslaw Szczurek and Piotr Parys and Peter Celliers and {Da Silva}, {Luiz B.} and Mrowka, {Stanley J.} and Dane, {C. Brent} and Matthews, {Dennis L} and Abate, {Joseph A.}",

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AU - Fiedorowicz, Henryk

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AU - Celliers, Peter

AU - Da Silva, Luiz B.

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AU - Dane, C. Brent

AU - Matthews, Dennis L

AU - Abate, Joseph A.

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N2 - Plasmas produced from laser-irradiated gas puff xenon targets, created by pulsed injection of xenon with high-pressure solenoid valve, offer the possibility of realizing a debrisless x-ray point source for the x-ray lithography applications. In this paper we present results of the experimental investigations on the x-ray generation from a gas puff xenon target irradiated with nanosecond high-power laser pulses produced using two different laser facilities; a Nd:glass laser operating at 1.06 μm, which generated 10-15 J pulses in 1 ns FWHM, and Nd:glass slab laser, producing pulses of 10 ns duration with energy reaching 12 J for a 0.53 μm wavelength or 20 J for 1.05 μm. To study the x-ray emission different x-ray diagnostic methods have been used. X-ray spectra were registered using a flat CsAP crystal spectrograph with an x-ray film or a curved KAP crystal spectrograph with a convex curvature coupled to an x-ray CCD readout detector. X-ray images have been taken using pinhole cameras with an x-ray film or a CCD array. X-ray yield was measured with the use of semiconductor detectors (silicon photodiodes or diamond photoconductors).

AB - Plasmas produced from laser-irradiated gas puff xenon targets, created by pulsed injection of xenon with high-pressure solenoid valve, offer the possibility of realizing a debrisless x-ray point source for the x-ray lithography applications. In this paper we present results of the experimental investigations on the x-ray generation from a gas puff xenon target irradiated with nanosecond high-power laser pulses produced using two different laser facilities; a Nd:glass laser operating at 1.06 μm, which generated 10-15 J pulses in 1 ns FWHM, and Nd:glass slab laser, producing pulses of 10 ns duration with energy reaching 12 J for a 0.53 μm wavelength or 20 J for 1.05 μm. To study the x-ray emission different x-ray diagnostic methods have been used. X-ray spectra were registered using a flat CsAP crystal spectrograph with an x-ray film or a curved KAP crystal spectrograph with a convex curvature coupled to an x-ray CCD readout detector. X-ray images have been taken using pinhole cameras with an x-ray film or a CCD array. X-ray yield was measured with the use of semiconductor detectors (silicon photodiodes or diamond photoconductors).

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