Fabrication and testing of high aspect ratio metal micro-gas chromatograph columns

Abhinav Bhushan, Dawit Yemane, Jost Goettert, Edward B. Overton, Michael C. Murphy

Research output: Chapter in Book/Report/Conference proceedingConference contribution

9 Scopus citations

Abstract

Micro gas Chromatograph (GC) separation columns were fabricated and tested. Rectangular columns with high aspect ratio have inherent benefits over traditional tubular columns and can easily be integrated into a GC sensor system for rapid Chromatographic analysis. The 2 m long, 50 μm wide, 500 μm tall columns were fabricated out of electroplated nickel through deep X-ray lithography using the LIGA technique. Critical fabrication issues including reproducible fabrication of compact footprint, deep columns and sealing of the metal columns were addressed. Experiments were conducted to establish the relationship between column head pressure and flow rate. Methane samples analyzed using hydrogen as a carrier gas on uncoated columns showed very little dispersion suggesting that there was no internal leakage in the columns. The sensor performance data compares well with other micro GC sensor systems.

Original languageEnglish (US)
Title of host publicationAmerican Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS
PublisherAmerican Society of Mechanical Engineers (ASME)
Pages321-324
Number of pages4
DOIs
StatePublished - 2004
Externally publishedYes
Event2004 ASME International Mechanical Engineering Congress and Exposition, IMECE - Anaheim, CA, United States
Duration: Nov 13 2004Nov 19 2004

Other

Other2004 ASME International Mechanical Engineering Congress and Exposition, IMECE
CountryUnited States
CityAnaheim, CA
Period11/13/0411/19/04

ASJC Scopus subject areas

  • Engineering(all)

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