Fabrication and preliminary results for LiGA fabricated nickel micro gas chromatograph columns

Abhinav Bhushan, Dawit Yemane, Edward B. Overton, Jost Goettert, Michael C. Murphy

Research output: Contribution to journalArticle

55 Citations (Scopus)

Abstract

High aspect ratio nickel microfluidic columns were fabricated using the LiGA technique. The 2-m-long 50-μm-wide high aspect ratio columns will be the separation component of a handheld gas chromatograph device for detecting semivolatile and volatile compounds. As a first step, 600-μm-deep electrodeposited nickel columns were fabricated. The serpentine columns were sealed and pressure-flow rate characteristics compared with the theoretical values. The response of the sealed columns was studied by running methane gas plugs through uncoated columns with a flame ionization detector at the exit. Negligible flow-induced dispersion was observed in the sealed metal columns. Unretained peak widths of ∼15 ms were measured, and the experimental pressure and flow rate distributions matched those predicted by established analytical models within ±2.5%. Columns were coated with OV-1 stationary phase using static coating methods. A mixture of four hydrocarbons C6, C8, C10, and C12 was separated in a coated 50 μm by 600 μm by 0.5 m column in less than 2 s at 70°C.

Original languageEnglish (US)
Pages (from-to)383-393
Number of pages11
JournalJournal of Microelectromechanical Systems
Volume16
Issue number2
DOIs
StatePublished - Apr 2007
Externally publishedYes

Fingerprint

Aspect ratio
Nickel
Flow rate
Fabrication
Gases
Microfluidics
Ionization
Analytical models
Methane
Hydrocarbons
Detectors
Coatings
Metals

Keywords

  • Fast gas chromatography
  • LiGA
  • Micro gas chromatograph (GC)
  • X-ray lithography

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Mechanical Engineering

Cite this

Fabrication and preliminary results for LiGA fabricated nickel micro gas chromatograph columns. / Bhushan, Abhinav; Yemane, Dawit; Overton, Edward B.; Goettert, Jost; Murphy, Michael C.

In: Journal of Microelectromechanical Systems, Vol. 16, No. 2, 04.2007, p. 383-393.

Research output: Contribution to journalArticle

Bhushan, Abhinav ; Yemane, Dawit ; Overton, Edward B. ; Goettert, Jost ; Murphy, Michael C. / Fabrication and preliminary results for LiGA fabricated nickel micro gas chromatograph columns. In: Journal of Microelectromechanical Systems. 2007 ; Vol. 16, No. 2. pp. 383-393.
@article{8cac0b91faf349fd8c7301a298aa893e,
title = "Fabrication and preliminary results for LiGA fabricated nickel micro gas chromatograph columns",
abstract = "High aspect ratio nickel microfluidic columns were fabricated using the LiGA technique. The 2-m-long 50-μm-wide high aspect ratio columns will be the separation component of a handheld gas chromatograph device for detecting semivolatile and volatile compounds. As a first step, 600-μm-deep electrodeposited nickel columns were fabricated. The serpentine columns were sealed and pressure-flow rate characteristics compared with the theoretical values. The response of the sealed columns was studied by running methane gas plugs through uncoated columns with a flame ionization detector at the exit. Negligible flow-induced dispersion was observed in the sealed metal columns. Unretained peak widths of ∼15 ms were measured, and the experimental pressure and flow rate distributions matched those predicted by established analytical models within ±2.5{\%}. Columns were coated with OV-1 stationary phase using static coating methods. A mixture of four hydrocarbons C6, C8, C10, and C12 was separated in a coated 50 μm by 600 μm by 0.5 m column in less than 2 s at 70°C.",
keywords = "Fast gas chromatography, LiGA, Micro gas chromatograph (GC), X-ray lithography",
author = "Abhinav Bhushan and Dawit Yemane and Overton, {Edward B.} and Jost Goettert and Murphy, {Michael C.}",
year = "2007",
month = "4",
doi = "10.1109/JMEMS.2007.892903",
language = "English (US)",
volume = "16",
pages = "383--393",
journal = "Journal of Microelectromechanical Systems",
issn = "1057-7157",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
number = "2",

}

TY - JOUR

T1 - Fabrication and preliminary results for LiGA fabricated nickel micro gas chromatograph columns

AU - Bhushan, Abhinav

AU - Yemane, Dawit

AU - Overton, Edward B.

AU - Goettert, Jost

AU - Murphy, Michael C.

PY - 2007/4

Y1 - 2007/4

N2 - High aspect ratio nickel microfluidic columns were fabricated using the LiGA technique. The 2-m-long 50-μm-wide high aspect ratio columns will be the separation component of a handheld gas chromatograph device for detecting semivolatile and volatile compounds. As a first step, 600-μm-deep electrodeposited nickel columns were fabricated. The serpentine columns were sealed and pressure-flow rate characteristics compared with the theoretical values. The response of the sealed columns was studied by running methane gas plugs through uncoated columns with a flame ionization detector at the exit. Negligible flow-induced dispersion was observed in the sealed metal columns. Unretained peak widths of ∼15 ms were measured, and the experimental pressure and flow rate distributions matched those predicted by established analytical models within ±2.5%. Columns were coated with OV-1 stationary phase using static coating methods. A mixture of four hydrocarbons C6, C8, C10, and C12 was separated in a coated 50 μm by 600 μm by 0.5 m column in less than 2 s at 70°C.

AB - High aspect ratio nickel microfluidic columns were fabricated using the LiGA technique. The 2-m-long 50-μm-wide high aspect ratio columns will be the separation component of a handheld gas chromatograph device for detecting semivolatile and volatile compounds. As a first step, 600-μm-deep electrodeposited nickel columns were fabricated. The serpentine columns were sealed and pressure-flow rate characteristics compared with the theoretical values. The response of the sealed columns was studied by running methane gas plugs through uncoated columns with a flame ionization detector at the exit. Negligible flow-induced dispersion was observed in the sealed metal columns. Unretained peak widths of ∼15 ms were measured, and the experimental pressure and flow rate distributions matched those predicted by established analytical models within ±2.5%. Columns were coated with OV-1 stationary phase using static coating methods. A mixture of four hydrocarbons C6, C8, C10, and C12 was separated in a coated 50 μm by 600 μm by 0.5 m column in less than 2 s at 70°C.

KW - Fast gas chromatography

KW - LiGA

KW - Micro gas chromatograph (GC)

KW - X-ray lithography

UR - http://www.scopus.com/inward/record.url?scp=34147177718&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=34147177718&partnerID=8YFLogxK

U2 - 10.1109/JMEMS.2007.892903

DO - 10.1109/JMEMS.2007.892903

M3 - Article

VL - 16

SP - 383

EP - 393

JO - Journal of Microelectromechanical Systems

JF - Journal of Microelectromechanical Systems

SN - 1057-7157

IS - 2

ER -