Fabrication and preliminary results for LiGA fabricated nickel micro gas chromatograph columns

Abhinav Bhushan, Dawit Yemane, Edward B. Overton, Jost Goettert, Michael C. Murphy

Research output: Contribution to journalArticlepeer-review

59 Scopus citations


High aspect ratio nickel microfluidic columns were fabricated using the LiGA technique. The 2-m-long 50-μm-wide high aspect ratio columns will be the separation component of a handheld gas chromatograph device for detecting semivolatile and volatile compounds. As a first step, 600-μm-deep electrodeposited nickel columns were fabricated. The serpentine columns were sealed and pressure-flow rate characteristics compared with the theoretical values. The response of the sealed columns was studied by running methane gas plugs through uncoated columns with a flame ionization detector at the exit. Negligible flow-induced dispersion was observed in the sealed metal columns. Unretained peak widths of ∼15 ms were measured, and the experimental pressure and flow rate distributions matched those predicted by established analytical models within ±2.5%. Columns were coated with OV-1 stationary phase using static coating methods. A mixture of four hydrocarbons C6, C8, C10, and C12 was separated in a coated 50 μm by 600 μm by 0.5 m column in less than 2 s at 70°C.

Original languageEnglish (US)
Pages (from-to)383-393
Number of pages11
JournalJournal of Microelectromechanical Systems
Issue number2
StatePublished - Apr 2007
Externally publishedYes


  • Fast gas chromatography
  • LiGA
  • Micro gas chromatograph (GC)
  • X-ray lithography

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Mechanical Engineering


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