Abstract
High aspect ratio nickel microfluidic columns were fabricated using the LiGA technique. The 2-m-long 50-μm-wide high aspect ratio columns will be the separation component of a handheld gas chromatograph device for detecting semivolatile and volatile compounds. As a first step, 600-μm-deep electrodeposited nickel columns were fabricated. The serpentine columns were sealed and pressure-flow rate characteristics compared with the theoretical values. The response of the sealed columns was studied by running methane gas plugs through uncoated columns with a flame ionization detector at the exit. Negligible flow-induced dispersion was observed in the sealed metal columns. Unretained peak widths of ∼15 ms were measured, and the experimental pressure and flow rate distributions matched those predicted by established analytical models within ±2.5%. Columns were coated with OV-1 stationary phase using static coating methods. A mixture of four hydrocarbons C6, C8, C10, and C12 was separated in a coated 50 μm by 600 μm by 0.5 m column in less than 2 s at 70°C.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 383-393 |
| Number of pages | 11 |
| Journal | Journal of Microelectromechanical Systems |
| Volume | 16 |
| Issue number | 2 |
| DOIs | |
| State | Published - Apr 2007 |
| Externally published | Yes |
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Keywords
- Fast gas chromatography
- LiGA
- Micro gas chromatograph (GC)
- X-ray lithography
ASJC Scopus subject areas
- Electrical and Electronic Engineering
- Mechanical Engineering
Cite this
Fabrication and preliminary results for LiGA fabricated nickel micro gas chromatograph columns. / Bhushan, Abhinav; Yemane, Dawit; Overton, Edward B.; Goettert, Jost; Murphy, Michael C.
In: Journal of Microelectromechanical Systems, Vol. 16, No. 2, 04.2007, p. 383-393.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Fabrication and preliminary results for LiGA fabricated nickel micro gas chromatograph columns
AU - Bhushan, Abhinav
AU - Yemane, Dawit
AU - Overton, Edward B.
AU - Goettert, Jost
AU - Murphy, Michael C.
PY - 2007/4
Y1 - 2007/4
N2 - High aspect ratio nickel microfluidic columns were fabricated using the LiGA technique. The 2-m-long 50-μm-wide high aspect ratio columns will be the separation component of a handheld gas chromatograph device for detecting semivolatile and volatile compounds. As a first step, 600-μm-deep electrodeposited nickel columns were fabricated. The serpentine columns were sealed and pressure-flow rate characteristics compared with the theoretical values. The response of the sealed columns was studied by running methane gas plugs through uncoated columns with a flame ionization detector at the exit. Negligible flow-induced dispersion was observed in the sealed metal columns. Unretained peak widths of ∼15 ms were measured, and the experimental pressure and flow rate distributions matched those predicted by established analytical models within ±2.5%. Columns were coated with OV-1 stationary phase using static coating methods. A mixture of four hydrocarbons C6, C8, C10, and C12 was separated in a coated 50 μm by 600 μm by 0.5 m column in less than 2 s at 70°C.
AB - High aspect ratio nickel microfluidic columns were fabricated using the LiGA technique. The 2-m-long 50-μm-wide high aspect ratio columns will be the separation component of a handheld gas chromatograph device for detecting semivolatile and volatile compounds. As a first step, 600-μm-deep electrodeposited nickel columns were fabricated. The serpentine columns were sealed and pressure-flow rate characteristics compared with the theoretical values. The response of the sealed columns was studied by running methane gas plugs through uncoated columns with a flame ionization detector at the exit. Negligible flow-induced dispersion was observed in the sealed metal columns. Unretained peak widths of ∼15 ms were measured, and the experimental pressure and flow rate distributions matched those predicted by established analytical models within ±2.5%. Columns were coated with OV-1 stationary phase using static coating methods. A mixture of four hydrocarbons C6, C8, C10, and C12 was separated in a coated 50 μm by 600 μm by 0.5 m column in less than 2 s at 70°C.
KW - Fast gas chromatography
KW - LiGA
KW - Micro gas chromatograph (GC)
KW - X-ray lithography
UR - http://www.scopus.com/inward/record.url?scp=34147177718&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=34147177718&partnerID=8YFLogxK
U2 - 10.1109/JMEMS.2007.892903
DO - 10.1109/JMEMS.2007.892903
M3 - Article
AN - SCOPUS:34147177718
VL - 16
SP - 383
EP - 393
JO - Journal of Microelectromechanical Systems
JF - Journal of Microelectromechanical Systems
SN - 1057-7157
IS - 2
ER -