Fabrication and preliminary results for LiGA fabricated nickel micro gas chromatograph columns

High aspect ratio nickel microfluidic columns were fabricated using the LiGA technique. The 2-m-long 50-μm-wide high aspect ratio columns will be the separation component of a handheld gas chromatograph device for detecting semivolatile and volatile compounds. As a first step, 600-μm-deep electrodeposited nickel columns were fabricated. The serpentine columns were sealed and pressure-flow rate characteristics compared with the theoretical values. The response of the sealed columns was studied by running methane gas plugs through uncoated columns with a flame ionization detector at the exit. Negligible flow-induced dispersion was observed in the sealed metal columns. Unretained peak widths of ∼15 ms were measured, and the experimental pressure and flow rate distributions matched those predicted by established analytical models within ±2.5%. Columns were coated with OV-1 stationary phase using static coating methods. A mixture of four hydrocarbons C₆, C₈, C₁₀, and C₁₂ was separated in a coated 50 μm by 600 μm by 0.5 m column in less than 2 s at 70°C.