Epitaxial growth of SrTiO3 on SrTiO3(001) using an oblique-incidence reflectance-difference technique

X. D. Zhu, H. B. Lu, Guo Zhen Yang, Zhi Yuan Li, Ben Yuan Gu, Dao Zhong Zhang

Research output: Contribution to journalArticle

38 Citations (Scopus)

Abstract

In a measurement of pulsed laser deposition of SrTiO3 on SrTiO3(001), we demonstrate that the difference in relative reflectivity change ΔR/R between s- and p-polarized light can be used in a real-time monitor of thin film growth at the level of a single atomic layer. This reflectance difference has the same sensitivity (0.01 monolayer), the real-time monitoring capability, and the spectral resolution as the conventional reflectance-difference spectroscopy developed by Aspnes and co-workers. The present reflectance-difference technique does not rely on the existence of optical anisotropy within the surface plane and therefore is applicable to investigation and control of thin film growth on all surfaces. Compared to the surface photoabsorption technique developed by Kobayashi and Horikoshi, our technique improves the signal-to-noise ratio by at least one order of magnitude through reducing the background to a level equivalent to ΔR/R = 1 × 10-5 or below.

Original languageEnglish (US)
Pages (from-to)2514-2519
Number of pages6
JournalPhysical Review B - Condensed Matter and Materials Physics
Volume57
Issue number4
StatePublished - 1998

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Epitaxial growth
incidence
reflectance
Film growth
Optical anisotropy
Thin films
Spectral resolution
photoabsorption
Light polarization
Pulsed laser deposition
thin films
spectral resolution
polarized light
sands
pulsed laser deposition
monitors
Monolayers
Signal to noise ratio
signal to noise ratios
Sand

ASJC Scopus subject areas

  • Condensed Matter Physics

Cite this

Epitaxial growth of SrTiO3 on SrTiO3(001) using an oblique-incidence reflectance-difference technique. / Zhu, X. D.; Lu, H. B.; Yang, Guo Zhen; Li, Zhi Yuan; Gu, Ben Yuan; Zhang, Dao Zhong.

In: Physical Review B - Condensed Matter and Materials Physics, Vol. 57, No. 4, 1998, p. 2514-2519.

Research output: Contribution to journalArticle

Zhu, X. D. ; Lu, H. B. ; Yang, Guo Zhen ; Li, Zhi Yuan ; Gu, Ben Yuan ; Zhang, Dao Zhong. / Epitaxial growth of SrTiO3 on SrTiO3(001) using an oblique-incidence reflectance-difference technique. In: Physical Review B - Condensed Matter and Materials Physics. 1998 ; Vol. 57, No. 4. pp. 2514-2519.
@article{331c8acc84054e928fbdc2c15339f615,
title = "Epitaxial growth of SrTiO3 on SrTiO3(001) using an oblique-incidence reflectance-difference technique",
abstract = "In a measurement of pulsed laser deposition of SrTiO3 on SrTiO3(001), we demonstrate that the difference in relative reflectivity change ΔR/R between s- and p-polarized light can be used in a real-time monitor of thin film growth at the level of a single atomic layer. This reflectance difference has the same sensitivity (0.01 monolayer), the real-time monitoring capability, and the spectral resolution as the conventional reflectance-difference spectroscopy developed by Aspnes and co-workers. The present reflectance-difference technique does not rely on the existence of optical anisotropy within the surface plane and therefore is applicable to investigation and control of thin film growth on all surfaces. Compared to the surface photoabsorption technique developed by Kobayashi and Horikoshi, our technique improves the signal-to-noise ratio by at least one order of magnitude through reducing the background to a level equivalent to ΔR/R = 1 × 10-5 or below.",
author = "Zhu, {X. D.} and Lu, {H. B.} and Yang, {Guo Zhen} and Li, {Zhi Yuan} and Gu, {Ben Yuan} and Zhang, {Dao Zhong}",
year = "1998",
language = "English (US)",
volume = "57",
pages = "2514--2519",
journal = "Physical Review B-Condensed Matter",
issn = "0163-1829",
publisher = "American Institute of Physics Publising LLC",
number = "4",

}

TY - JOUR

T1 - Epitaxial growth of SrTiO3 on SrTiO3(001) using an oblique-incidence reflectance-difference technique

AU - Zhu, X. D.

AU - Lu, H. B.

AU - Yang, Guo Zhen

AU - Li, Zhi Yuan

AU - Gu, Ben Yuan

AU - Zhang, Dao Zhong

PY - 1998

Y1 - 1998

N2 - In a measurement of pulsed laser deposition of SrTiO3 on SrTiO3(001), we demonstrate that the difference in relative reflectivity change ΔR/R between s- and p-polarized light can be used in a real-time monitor of thin film growth at the level of a single atomic layer. This reflectance difference has the same sensitivity (0.01 monolayer), the real-time monitoring capability, and the spectral resolution as the conventional reflectance-difference spectroscopy developed by Aspnes and co-workers. The present reflectance-difference technique does not rely on the existence of optical anisotropy within the surface plane and therefore is applicable to investigation and control of thin film growth on all surfaces. Compared to the surface photoabsorption technique developed by Kobayashi and Horikoshi, our technique improves the signal-to-noise ratio by at least one order of magnitude through reducing the background to a level equivalent to ΔR/R = 1 × 10-5 or below.

AB - In a measurement of pulsed laser deposition of SrTiO3 on SrTiO3(001), we demonstrate that the difference in relative reflectivity change ΔR/R between s- and p-polarized light can be used in a real-time monitor of thin film growth at the level of a single atomic layer. This reflectance difference has the same sensitivity (0.01 monolayer), the real-time monitoring capability, and the spectral resolution as the conventional reflectance-difference spectroscopy developed by Aspnes and co-workers. The present reflectance-difference technique does not rely on the existence of optical anisotropy within the surface plane and therefore is applicable to investigation and control of thin film growth on all surfaces. Compared to the surface photoabsorption technique developed by Kobayashi and Horikoshi, our technique improves the signal-to-noise ratio by at least one order of magnitude through reducing the background to a level equivalent to ΔR/R = 1 × 10-5 or below.

UR - http://www.scopus.com/inward/record.url?scp=0001308463&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0001308463&partnerID=8YFLogxK

M3 - Article

VL - 57

SP - 2514

EP - 2519

JO - Physical Review B-Condensed Matter

JF - Physical Review B-Condensed Matter

SN - 0163-1829

IS - 4

ER -