Effect of Dissolution Kinetics on Feature Size in Dip-Pen Nanolithography

B. L. Weeks, Aleksandr Noy, A. E. Miller, J. J. De Yoreo

Research output: Contribution to journalArticle

2 Scopus citations

Abstract

We have investigated the effects of humidity, tip speed, and dwell time on feature size during dip pen nanolithography. Our results indicate a transition between two distinct deposition regimes occurs at a dwell time independent of humidity. While feature size increases with humidity, the relative increase is independent of dwell time. The results are described by a model that accounts for detachment and reattachment at the tip. The model suggests that, at short dwell times (high speed), the most important parameter controlling the feature size is the activation energy for thiol detachment.

Original languageEnglish (US)
Number of pages1
JournalPhysical Review Letters
Volume88
Issue number25
DOIs
StatePublished - Jan 1 2002
Externally publishedYes

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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