Direct thermal-UV nanoimprint of an iron-containing organometallic hybrid film

Huilan Han, Abhinav Bhushan, Frank Yaghmaie, Cristina E Davis

Research output: Contribution to journalArticlepeer-review

4 Scopus citations

Abstract

Direct thermal-UV nanoimprinting of an organometallic hybrid film has been demonstrated to fabricate nanoscale features into a novel organic-inorganic solution containing selected metals. The film can be patterned at low temperature and pressure, and requires only a short processing time. When analyzed by energy dispersion X-ray spectroscopy, the authors observe both organic and metal content in the final patterned features. They have also observed that film thermal stability increases after UV and oxygen plasma treatments, which may lead to devices that perform well across a wide spectrum of temperatures.

Original languageEnglish (US)
Pages (from-to)78-81
Number of pages4
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume28
Issue number1
DOIs
StatePublished - 2010

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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