Direct thermal-UV nanoimprinting of an organometallic hybrid film has been demonstrated to fabricate nanoscale features into a novel organic-inorganic solution containing selected metals. The film can be patterned at low temperature and pressure, and requires only a short processing time. When analyzed by energy dispersion X-ray spectroscopy, the authors observe both organic and metal content in the final patterned features. They have also observed that film thermal stability increases after UV and oxygen plasma treatments, which may lead to devices that perform well across a wide spectrum of temperatures.
|Original language||English (US)|
|Number of pages||4|
|Journal||Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures|
|State||Published - 2010|
ASJC Scopus subject areas
- Condensed Matter Physics
- Electrical and Electronic Engineering