Direct projection on dry-film photoresist (DP2): Do-it-yourself three-dimensional polymer microfluidics

Siwei Zhao, Hailin Cong, Tingrui Pan

Research output: Contribution to journalArticle

54 Scopus citations

Abstract

In this paper, we present a novel rapid-prototyping process for out-of-cleanroom microfabrication of three-dimensional multilayer microfluidic structures with a 10 m resolution, referred to as the Direct Projection on Dry-film Photoresist (DP2). A commercially available digital projector is customized to function as a direct mask generation and photo exposure system, while easy-processing photosensitive dry films are used as the microfluidic constructs. Multilayer alignments among maskless-patterned layers are reliably achieved by using a Software Alignment technique with less than 10 m precision, which eliminates the use of mechanical travelling stage. The bonding between different layers of dry film, simply enabled by a plasma-assisted thermal lamination, offers an easy implementation for suspended multilayer microstructures. Development of a complex microfluidic chip from computer layout can thus be accomplished within an hour in a regular chemical or biological lab environment using this approach.

Original languageEnglish (US)
Pages (from-to)1128-1132
Number of pages5
JournalLab on a Chip
Volume9
Issue number8
DOIs
StatePublished - Jan 1 2009

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ASJC Scopus subject areas

  • Bioengineering
  • Biochemistry
  • Chemistry(all)
  • Biomedical Engineering

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