Abstract
In this paper, we present a novel rapid-prototyping process for out-of-cleanroom microfabrication of three-dimensional multilayer microfluidic structures with a 10 m resolution, referred to as the Direct Projection on Dry-film Photoresist (DP2). A commercially available digital projector is customized to function as a direct mask generation and photo exposure system, while easy-processing photosensitive dry films are used as the microfluidic constructs. Multilayer alignments among maskless-patterned layers are reliably achieved by using a Software Alignment technique with less than 10 m precision, which eliminates the use of mechanical travelling stage. The bonding between different layers of dry film, simply enabled by a plasma-assisted thermal lamination, offers an easy implementation for suspended multilayer microstructures. Development of a complex microfluidic chip from computer layout can thus be accomplished within an hour in a regular chemical or biological lab environment using this approach.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 1128-1132 |
| Number of pages | 5 |
| Journal | Lab on a Chip |
| Volume | 9 |
| Issue number | 8 |
| DOIs | |
| State | Published - Jan 1 2009 |
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ASJC Scopus subject areas
- Bioengineering
- Biochemistry
- Chemistry(all)
- Biomedical Engineering
Cite this
Direct projection on dry-film photoresist (DP2) : Do-it-yourself three-dimensional polymer microfluidics. / Zhao, Siwei; Cong, Hailin; Pan, Tingrui.
In: Lab on a Chip, Vol. 9, No. 8, 01.01.2009, p. 1128-1132.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Direct projection on dry-film photoresist (DP2)
T2 - Do-it-yourself three-dimensional polymer microfluidics
AU - Zhao, Siwei
AU - Cong, Hailin
AU - Pan, Tingrui
PY - 2009/1/1
Y1 - 2009/1/1
N2 - In this paper, we present a novel rapid-prototyping process for out-of-cleanroom microfabrication of three-dimensional multilayer microfluidic structures with a 10 m resolution, referred to as the Direct Projection on Dry-film Photoresist (DP2). A commercially available digital projector is customized to function as a direct mask generation and photo exposure system, while easy-processing photosensitive dry films are used as the microfluidic constructs. Multilayer alignments among maskless-patterned layers are reliably achieved by using a Software Alignment technique with less than 10 m precision, which eliminates the use of mechanical travelling stage. The bonding between different layers of dry film, simply enabled by a plasma-assisted thermal lamination, offers an easy implementation for suspended multilayer microstructures. Development of a complex microfluidic chip from computer layout can thus be accomplished within an hour in a regular chemical or biological lab environment using this approach.
AB - In this paper, we present a novel rapid-prototyping process for out-of-cleanroom microfabrication of three-dimensional multilayer microfluidic structures with a 10 m resolution, referred to as the Direct Projection on Dry-film Photoresist (DP2). A commercially available digital projector is customized to function as a direct mask generation and photo exposure system, while easy-processing photosensitive dry films are used as the microfluidic constructs. Multilayer alignments among maskless-patterned layers are reliably achieved by using a Software Alignment technique with less than 10 m precision, which eliminates the use of mechanical travelling stage. The bonding between different layers of dry film, simply enabled by a plasma-assisted thermal lamination, offers an easy implementation for suspended multilayer microstructures. Development of a complex microfluidic chip from computer layout can thus be accomplished within an hour in a regular chemical or biological lab environment using this approach.
UR - http://www.scopus.com/inward/record.url?scp=64649098963&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=64649098963&partnerID=8YFLogxK
U2 - 10.1039/b817925e
DO - 10.1039/b817925e
M3 - Article
C2 - 19350095
AN - SCOPUS:64649098963
VL - 9
SP - 1128
EP - 1132
JO - Lab on a Chip - Miniaturisation for Chemistry and Biology
JF - Lab on a Chip - Miniaturisation for Chemistry and Biology
SN - 1473-0197
IS - 8
ER -