Developments in limited data image reconstruction techniques for ultrahigh-resolution x-ray tomographic imaging of microchips

Waleed S. Haddad; James E. Trebes

doi:10.1117/12.292721

Developments in limited data image reconstruction techniques for ultrahigh-resolution x-ray tomographic imaging of microchips

Waleed S. Haddad, James E. Trebes

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

2 Scopus citations

Abstract

The use of soft x-ray nanotomography techniques for the evaluation and failure mode analysis of microchips was investigated. Realistic numerical simulations of the imaging process were performed and a specialized approach to image reconstruction from limited projection data was devised. Prior knowledge of the structure and its component materials was used to eliminate artifacts in the reconstructed images so that defects and deviations from the original design could be visualized. Simulated data sets wee generated with a total of 21 projections over three different angular ranges: -50 to +50, -80 to +80 and -90 to +90 degrees. In addition, a low level of illumination was assumed. It was shown that sub-micron defects within one cell of a microchip could be imaged in 3D using such an approach.

Original language	English (US)
Title of host publication	Proceedings of SPIE - The International Society for Optical Engineering
Pages	222-231
Number of pages	10
Volume	3149
DOIs	https://doi.org/10.1117/12.292721
State	Published - 1997
Externally published	Yes
Event	Developments in X-Ray Tomography - San Diego, CA, United States Duration: Jul 28 1997 → Jul 28 1997

Other

Other	Developments in X-Ray Tomography
Country	United States
City	San Diego, CA
Period	7/28/97 → 7/28/97

Keywords

3-D imaging
Image reconstruction
Iterative optimization
Microchips
X-ray tomography
Zone plates

ASJC Scopus subject areas

Applied Mathematics
Computer Science Applications
Electrical and Electronic Engineering
Electronic, Optical and Magnetic Materials
Condensed Matter Physics

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10.1117/12.292721

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Cite this

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title = "Developments in limited data image reconstruction techniques for ultrahigh-resolution x-ray tomographic imaging of microchips",

abstract = "The use of soft x-ray nanotomography techniques for the evaluation and failure mode analysis of microchips was investigated. Realistic numerical simulations of the imaging process were performed and a specialized approach to image reconstruction from limited projection data was devised. Prior knowledge of the structure and its component materials was used to eliminate artifacts in the reconstructed images so that defects and deviations from the original design could be visualized. Simulated data sets wee generated with a total of 21 projections over three different angular ranges: -50 to +50, -80 to +80 and -90 to +90 degrees. In addition, a low level of illumination was assumed. It was shown that sub-micron defects within one cell of a microchip could be imaged in 3D using such an approach.",

keywords = "3-D imaging, Image reconstruction, Iterative optimization, Microchips, X-ray tomography, Zone plates",

author = "Haddad, {Waleed S.} and Trebes, {James E.}",

year = "1997",

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language = "English (US)",

volume = "3149",

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AU - Haddad, Waleed S.

AU - Trebes, James E.

PY - 1997

Y1 - 1997

N2 - The use of soft x-ray nanotomography techniques for the evaluation and failure mode analysis of microchips was investigated. Realistic numerical simulations of the imaging process were performed and a specialized approach to image reconstruction from limited projection data was devised. Prior knowledge of the structure and its component materials was used to eliminate artifacts in the reconstructed images so that defects and deviations from the original design could be visualized. Simulated data sets wee generated with a total of 21 projections over three different angular ranges: -50 to +50, -80 to +80 and -90 to +90 degrees. In addition, a low level of illumination was assumed. It was shown that sub-micron defects within one cell of a microchip could be imaged in 3D using such an approach.

AB - The use of soft x-ray nanotomography techniques for the evaluation and failure mode analysis of microchips was investigated. Realistic numerical simulations of the imaging process were performed and a specialized approach to image reconstruction from limited projection data was devised. Prior knowledge of the structure and its component materials was used to eliminate artifacts in the reconstructed images so that defects and deviations from the original design could be visualized. Simulated data sets wee generated with a total of 21 projections over three different angular ranges: -50 to +50, -80 to +80 and -90 to +90 degrees. In addition, a low level of illumination was assumed. It was shown that sub-micron defects within one cell of a microchip could be imaged in 3D using such an approach.

KW - 3-D imaging

KW - Image reconstruction

KW - Iterative optimization

KW - Microchips

KW - X-ray tomography

KW - Zone plates

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