Development of characterization methods for micromachined embedded test structures

E. Davies-Venn, Tingrui Pan, A. Baldi, R. F. Drayton, B. Ziaie

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Methods of characterizing low frequency embedded passives on silicon substrates are suggested. Durioid fixtures and on-wafer methods are discussed for extracting Q factor of embedded coils on high and low resistivity silicon. Feedline designs are discuss and data is presented regarding the performance limitation of CPW based design architectures. A quality (Q) factor of an embedded inductor > 50 is successfully extracted for operation below 1 GHz based on a 15 turn configuration using S-parameter measurements. Finally inductor performance in terms of Q factor is presented based on on-wafer measurements.

Original languageEnglish (US)
Title of host publication2004 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems
Subtitle of host publicationDigest of Papers
EditorsJ.D. Cressler, J. Papapolymerou
Pages318-321
Number of pages4
StatePublished - Dec 1 2004
Externally publishedYes
Event2004 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems: Digest of Papers - Atlanta, GA, United States
Duration: Sep 8 2004Sep 10 2004

Other

Other2004 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems: Digest of Papers
CountryUnited States
CityAtlanta, GA
Period9/8/049/10/04

Fingerprint

Silicon
Scattering parameters
Substrates

Keywords

  • Characterization and testing
  • Q factor
  • Silicon embedded

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Davies-Venn, E., Pan, T., Baldi, A., Drayton, R. F., & Ziaie, B. (2004). Development of characterization methods for micromachined embedded test structures. In J. D. Cressler, & J. Papapolymerou (Eds.), 2004 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems: Digest of Papers (pp. 318-321)

Development of characterization methods for micromachined embedded test structures. / Davies-Venn, E.; Pan, Tingrui; Baldi, A.; Drayton, R. F.; Ziaie, B.

2004 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems: Digest of Papers. ed. / J.D. Cressler; J. Papapolymerou. 2004. p. 318-321.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Davies-Venn, E, Pan, T, Baldi, A, Drayton, RF & Ziaie, B 2004, Development of characterization methods for micromachined embedded test structures. in JD Cressler & J Papapolymerou (eds), 2004 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems: Digest of Papers. pp. 318-321, 2004 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems: Digest of Papers, Atlanta, GA, United States, 9/8/04.
Davies-Venn E, Pan T, Baldi A, Drayton RF, Ziaie B. Development of characterization methods for micromachined embedded test structures. In Cressler JD, Papapolymerou J, editors, 2004 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems: Digest of Papers. 2004. p. 318-321
Davies-Venn, E. ; Pan, Tingrui ; Baldi, A. ; Drayton, R. F. ; Ziaie, B. / Development of characterization methods for micromachined embedded test structures. 2004 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems: Digest of Papers. editor / J.D. Cressler ; J. Papapolymerou. 2004. pp. 318-321
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