Design and fabrication of fast micro heaters for temperature programming micro gas chromatographs

Chetan Ramesh, Abhinav Bhushan, Edward Overton, Michael C. Murphy

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Prototype, low power, high rate resistance heaters for temperature programming metal micro gas Chromatograph (GC) separation column chips were fabricated using UV lithography. Spin coated polyimide was used as the electrically insulating layer between the heating coil and the GC column chip because of its excellent thermal properties - in particular the ability to match the coefficient of thermal expansion with nickel and copper, and ease of application. Low resistivity, copper and nickel, metal heating elements were electrodeposited directly on the polyimide layer spin coated on top of the nickel GC column chips. In experiments, the microfabricated heaters were able to heat the GC column at rates from 5°C/sec to 50°C/sec under PID control, Temperatures from 125°C to 250°C were maintained for soak times of up to 30 seconds. The heaters can be used to generate a variety of temperature programming profiles and offer flexibility in selecting the different ramp rates and soak temperatures needed for different applications.

Original languageEnglish (US)
Title of host publicationASME International Mechanical Engineering Congress and Exposition, Proceedings
Pages357-362
Number of pages6
Volume11 PART A
DOIs
StatePublished - 2008
Externally publishedYes
EventASME International Mechanical Engineering Congress and Exposition, IMECE 2007 - Seattle, WA, United States
Duration: Nov 11 2007Nov 15 2007

Other

OtherASME International Mechanical Engineering Congress and Exposition, IMECE 2007
CountryUnited States
CitySeattle, WA
Period11/11/0711/15/07

ASJC Scopus subject areas

  • Engineering(all)

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