Cryogenic high-resolution X-ray spectrometers for SR-XRF and microanalysis

Matthias Frank, C. A. Mears, S. E. Labov, L. J. Hiller, J. B. Le Grand, M. A. Lindeman, H. Netel, D. Chow, A. T. Barfknecht

Research output: Contribution to journalArticlepeer-review

9 Scopus citations


Experimental results are presented obtained with a cryogenically cooled high-resolution X-ray spectrometer based on a 141 × 141 μm Nb-Al-Al2O3-Al-Nb superconducting tunnel junction (STJ) detector in an SR-XRF demonstration experiment. STJ detectors can operate at count rates approaching those of semiconductor detectors while still providing a significantly better energy resolution for soft X-rays. By measuring fluorescence X-rays from samples containing transition metals and low-Z elements, an FWHM energy resolution of 6-15 eV for X-rays in the energy range 180-1100 eV has been obtained. The results show that, in the near future, STJ detectors may prove very useful in XRF and microanalysis applications.

Original languageEnglish (US)
Pages (from-to)515-517
Number of pages3
JournalJournal of Synchrotron Radiation
Issue number3
StatePublished - May 1 1998
Externally publishedYes


  • Cryogenic detectors
  • Low-temperature detectors
  • Microcalorimeters
  • X-ray fluorescence
  • X-ray spectroscopy

ASJC Scopus subject areas

  • Radiation
  • Nuclear and High Energy Physics
  • Instrumentation


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