Compressive stress accumulation in composite nanoporous gold and silicone bilayer membranes: Underlying mechanisms and remedies

Erkin Seker, Ling Huang, Matthew R. Begley, Hilary Bart-Smith, Robert G. Kelly, Giovanni Zangari, Michael L. Reed, Marcel Utz

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper outlines a simple method to fabricate a bilayer membrane consisting of a thin nanoporous gold layer infused with uncured polydimethylsiloxane. The fabrication technique offers excellent adhesion due to mechanical interlocking between porous layer and elastomer, and excellent electrical conductivity of 1×10-6 Ω -m at small strains and 3×10-5 Ω -m at strains of 25% despite a very low effective elastic modulus (∼1.35 MPa) due to cracks in the embedded gold layer. Initially freestanding circular membranes displayed significant out of plane buckling, and created difficulties in extraction of membrane mechanical properties. The underlying mechanisms of compressive stress accumulation that lead to membrane buckling and remedies to prevent it are discussed.

Original languageEnglish (US)
Title of host publicationMicroelectromechanical Systems - Materials and Devices
Pages117-122
Number of pages6
Volume1052
StatePublished - Jun 30 2008
Externally publishedYes
EventMicroelectromechanical Systems - Materials and Devices - Boston, MA, United States
Duration: Nov 26 2007Nov 28 2007

Other

OtherMicroelectromechanical Systems - Materials and Devices
CountryUnited States
CityBoston, MA
Period11/26/0711/28/07

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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    Seker, E., Huang, L., Begley, M. R., Bart-Smith, H., Kelly, R. G., Zangari, G., Reed, M. L., & Utz, M. (2008). Compressive stress accumulation in composite nanoporous gold and silicone bilayer membranes: Underlying mechanisms and remedies. In Microelectromechanical Systems - Materials and Devices (Vol. 1052, pp. 117-122)