In this paper, a nanocomposite approach is introduced to provide both electrically conductive and optically transparent micropatterns on any flexible substrate employing photolithography-based microfabrication. The nanocomposite materials combine the highly directional nanoscopic networks and electrical conductivity of single-wall carbon nanotubes (SWNTs) with the photopatternability and optical transparency of SU-8 photoresist. The photopatternable nanocomposites have yielded high optical transparency of 90% and high electrical conductivity of 27.5 S m -1 with the minimal feature resolution of 10 μm. Additionally, an interesting nano-bridge phenomenon has been discovered during fabrication of the microscale features. Moreover, the photopatternable transparent conductive nanocomposite has demonstrated its application to biomedical sensing for exceptional adaptability and flexibility.
ASJC Scopus subject areas
- Mechanical Engineering
- Electrical and Electronic Engineering
- Mechanics of Materials
- Electronic, Optical and Magnetic Materials