Characterization of the focused output from a selenium soft x-ray laser

D. G. Nilson; S. B. Brown; C. J. Keane; B. J. MacGowan; Dennis L Matthews; J. E. Trebes; O. R. Wood; W. T. Silfvast; D. Y. Al-Salameh; T. E. Harvey; P. J. Maloney

doi:10.1063/1.101359

Characterization of the focused output from a selenium soft x-ray laser

D. G. Nilson, S. B. Brown, C. J. Keane, B. J. MacGowan, Dennis L Matthews, J. E. Trebes, O. R. Wood, W. T. Silfvast, D. Y. Al-Salameh, T. E. Harvey, P. J. Maloney

Research output: Contribution to journal › Article › peer-review

2 Scopus citations

Abstract

The output energy (90 μJ), focal spot diameter (235 μm), and pointing accuracy (±75 μrad) for a 3.7-cm-long Se soft x-ray laser operating at 20.6 and 20.9 nm are reported. Now that this intense soft x-ray source has been well characterized it may find use in such diverse applications as lithography, contact microscopy, holography, and photoionization pumping.

Original language	English (US)
Pages (from-to)	786-788
Number of pages	3
Journal	Applied Physics Letters
Volume	54
Issue number	9
DOIs	https://doi.org/10.1063/1.101359
State	Published - 1989
Externally published	Yes

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

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10.1063/1.101359

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Characterization of the focused output from a selenium soft x-ray laser. / Nilson, D. G.; Brown, S. B.; Keane, C. J.; MacGowan, B. J.; Matthews, Dennis L; Trebes, J. E.; Wood, O. R.; Silfvast, W. T.; Al-Salameh, D. Y.; Harvey, T. E.; Maloney, P. J.

In: Applied Physics Letters, Vol. 54, No. 9, 1989, p. 786-788.

Research output: Contribution to journal › Article › peer-review

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abstract = "The output energy (90 μJ), focal spot diameter (235 μm), and pointing accuracy (±75 μrad) for a 3.7-cm-long Se soft x-ray laser operating at 20.6 and 20.9 nm are reported. Now that this intense soft x-ray source has been well characterized it may find use in such diverse applications as lithography, contact microscopy, holography, and photoionization pumping.",

author = "Nilson, {D. G.} and Brown, {S. B.} and Keane, {C. J.} and MacGowan, {B. J.} and Matthews, {Dennis L} and Trebes, {J. E.} and Wood, {O. R.} and Silfvast, {W. T.} and Al-Salameh, {D. Y.} and Harvey, {T. E.} and Maloney, {P. J.}",

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doi = "10.1063/1.101359",

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AU - Nilson, D. G.

AU - Brown, S. B.

AU - Keane, C. J.

AU - MacGowan, B. J.

AU - Matthews, Dennis L

AU - Trebes, J. E.

AU - Wood, O. R.

AU - Silfvast, W. T.

AU - Al-Salameh, D. Y.

AU - Harvey, T. E.

AU - Maloney, P. J.

PY - 1989

Y1 - 1989

N2 - The output energy (90 μJ), focal spot diameter (235 μm), and pointing accuracy (±75 μrad) for a 3.7-cm-long Se soft x-ray laser operating at 20.6 and 20.9 nm are reported. Now that this intense soft x-ray source has been well characterized it may find use in such diverse applications as lithography, contact microscopy, holography, and photoionization pumping.

AB - The output energy (90 μJ), focal spot diameter (235 μm), and pointing accuracy (±75 μrad) for a 3.7-cm-long Se soft x-ray laser operating at 20.6 and 20.9 nm are reported. Now that this intense soft x-ray source has been well characterized it may find use in such diverse applications as lithography, contact microscopy, holography, and photoionization pumping.

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JO - Applied Physics Letters

JF - Applied Physics Letters

SN - 0003-6951

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Characterization of the focused output from a selenium soft x-ray laser

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