Abstract
The output energy (90 μJ), focal spot diameter (235 μm), and pointing accuracy (±75 μrad) for a 3.7-cm-long Se soft x-ray laser operating at 20.6 and 20.9 nm are reported. Now that this intense soft x-ray source has been well characterized it may find use in such diverse applications as lithography, contact microscopy, holography, and photoionization pumping.
Original language | English (US) |
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Pages (from-to) | 786-788 |
Number of pages | 3 |
Journal | Applied Physics Letters |
Volume | 54 |
Issue number | 9 |
DOIs | |
State | Published - 1989 |
Externally published | Yes |
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)