Characterization of the focused output from a selenium soft x-ray laser

D. G. Nilson, S. B. Brown, C. J. Keane, B. J. MacGowan, Dennis L Matthews, J. E. Trebes, O. R. Wood, W. T. Silfvast, D. Y. Al-Salameh, T. E. Harvey, P. J. Maloney

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Abstract

The output energy (90 μJ), focal spot diameter (235 μm), and pointing accuracy (±75 μrad) for a 3.7-cm-long Se soft x-ray laser operating at 20.6 and 20.9 nm are reported. Now that this intense soft x-ray source has been well characterized it may find use in such diverse applications as lithography, contact microscopy, holography, and photoionization pumping.

Original languageEnglish (US)
Pages (from-to)786-788
Number of pages3
JournalApplied Physics Letters
Volume54
Issue number9
DOIs
StatePublished - 1989
Externally publishedYes

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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    Nilson, D. G., Brown, S. B., Keane, C. J., MacGowan, B. J., Matthews, D. L., Trebes, J. E., Wood, O. R., Silfvast, W. T., Al-Salameh, D. Y., Harvey, T. E., & Maloney, P. J. (1989). Characterization of the focused output from a selenium soft x-ray laser. Applied Physics Letters, 54(9), 786-788. https://doi.org/10.1063/1.101359